Original title: SMV-2018-20: Elektronově optické vlatnosti multi-svazkového zdroje elektronů
Translated title: SMV-2018-20: Electron optical propertis of the multibeam electron source
Authors: Radlička, Tomáš
Document type: Research reports
Year: 2018
Language: cze
Abstract: [cze] [eng]

Keywords: electron source; multi-beam SEM

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0291421

Permalink: http://www.nusl.cz/ntk/nusl-390773


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports
 Record created 2019-01-07, last modified 2019-03-28


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