Original title: Elektronová litografie na nevodivých substrátech
Translated title: Electron beam lithography on non-conductive substrates
Authors: Hovádková, Zuzana ; Šamořil, Tomáš (referee) ; Dvořák, Petr (advisor)
Document type: Bachelor's theses
Year: 2018
Language: cze
Publisher: Vysoké učení technické v Brně. Fakulta strojního inženýrství
Abstract: [cze] [eng]

Keywords: charging effect; deposition of conductive layer; Electron beam lithography (EBL); scanning electron microscopy (SEM); spin coating; variable pressure electron beam lithography (VP EBL); depozice vodivé vrstvy; efekt nabíjení; elektronová litografie za variabilního tlaku (VP EBL); Litografie elektronovým svazkem (EBL); skenovací elektronová mirkoskopie (SEM); spin coating

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/83773

Permalink: http://www.nusl.cz/ntk/nusl-382678


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Bachelor's theses
 Record created 2018-07-09, last modified 2020-04-09


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