Original title: Dotování grafenu pomocí pomalých elektronů
Translated title: Graphene doping by low-energy electrons
Authors: Stará, Veronika ; Kunc, Jan (referee) ; Čechal, Jan (advisor)
Document type: Master’s theses
Year: 2018
Language: eng
Publisher: Vysoké učení technické v Brně. Fakulta strojního inženýrství
Abstract: [eng] [cze]

Keywords: ALD; CVD; dotování; elektronový svazek; FET; Grafen; litografie; ALD; CVD; doping; electron beam; FET; Graphene; lithography

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/83359

Permalink: http://www.nusl.cz/ntk/nusl-382273


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Master’s theses
 Record created 2018-07-09, last modified 2019-03-28


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