Original title: Termomechanická stabilita DLC/SiOx vrstev
Translated title: Thermomechanical stability of DLC/SiOx films
Authors: Buršíková, V. ; Buršík, Jiří ; Sťahel, P. ; Klapetek, P. ; Bláhová, O.
Document type: Papers
Conference/Event: Vrstvy a povlaky 2006, Rožnov pod Radhoštěm (CZ), 2006-10-10 / 2006-10-11
Year: 2006
Language: cze
Abstract: [cze] [eng]
Termomechanická stabilita DLC/SiOx vrstev. Thermomechanical stability of DLC/SiOx films.
Keywords: DLC; plasma enhanced chemical vapor deposition; thermal stability
Project no.: CEZ:AV0Z20410507 (CEP), GA202/05/0607 (CEP)
Funding provider: GA ČR
Host item entry: Vrstvy a povlaky /5./, ISBN 80-969310-2-4

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0138060

Permalink: http://www.nusl.cz/ntk/nusl-35986


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Research > Institutes ASCR > Institute of Physics of Materials
Conference materials > Papers