Tryskové plazmatické systémy - experiment a model

Rubovič, Peter

In the present work we study the ow of working gas through a plasmajet system. In this work we describe the basic principle of hollow cathode discharge and its use for technological applications, mainly for thin layers coating. One of the important parameters during the deposition is the speed of the working gas ow and with it the sputtered target material towards the substrate. Because of the reproducibility and precision of the experiments it is important to know the relation between the working gas ow and external parameters of the experiment, e.g. ow of the gas and the pressure in the chamber. This is the reason why measurements of ions velocity using Langmuire electrostatic probe and pulse regime of plasmajet were done. Measured data are compared with a computer model, which was developed in this work. This model describes the ow of the working gas by solving Navier-Stokes equation for compressible Newtonian uids. The results of this model are compared with results from the paper describing the ow through the hollow cathode. It shows good agreement inside the cathode. The model is giving dierent results when comparing to measured data which are from the area outside the cathode. Part of the model description is a discussion of the temperature dependence of the ow.

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