Original title: In situ XPS characterization of diamond films after AR.sup.+./sup. cluster ion beam sputtering
Authors: Artemenko, Anna ; Babchenko, Oleg ; Kozak, Halyna ; Ukraintsev, Egor ; Ižák, Tibor ; Romanyuk, Olexandr ; Potocký, Štěpán ; Kromka, Alexander
Document type: Papers
Conference/Event: NANOCON 2015. International Conference /7./, Brno (CZ), 20151014
Year: 2015
Language: eng
Abstract: In this work, in situ XPS analysis of chemical composition of H- and O-terminated nano- and microcrystalline diamond (NCD and MCD) films before and after their sputtering by the Ar+ cluster ion beam was investigated. Scanning electron microscopy confirmed sputtering of all diamond surfaces with a rate about 0.5 nm/min. Raman spectroscopy and XPS revealed surface graphitization of diamond surface induced by sputtering. Moreover, XPS data showed the presence of about 0.7 % of Ar atoms on the investigated diamond surface after 66 min of sputtering. Also, oxygen residuals were still presented on the H-NCD surface after 66 min of sputtering. In contrast, no oxygen was found on the H-MCD surface just after 2 min of sputtering. Surface composition is discussed in respect to the diamond films growth parameters and surface structure.
Keywords: depth profiling; diamond; Raman; sputtering; XPS
Project no.: GA15-01687S (CEP)
Funding provider: GA ČR
Host item entry: NANOCON 2015: 7th International Conference on Nanomaterials - Research and Application, Conference Proceedings, ISBN 978-80-87294-63-5

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0253621

Permalink: http://www.nusl.cz/ntk/nusl-201280

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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers
 Record created 2015-12-24, last modified 2020-03-27

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