Original title:
Zoom Lens Imaging System for Electron Beam Microscope
Authors:
Melich, Radek ; Lédl, Vít Document type: Research reports
Year:
2012
Language:
eng Abstract:
The aim of this study is to provide a preliminary design of a zoom imaging system for electron beam microscopy with a respect to the given mechanical and environmental restrictions.
Keywords:
electron microscopy; imaging system
Institution: Institute of Plasma Physics AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0232692