Název:
Innovation possibilities of scintillation electron detector for SEM
Autoři:
Schauer, Petr ; Bok, Jan Typ dokumentu: Příspěvky z konference Konference/Akce: International Microscopy Congres /18./, Praha (CZ), 2014-09-07 / 2014-09-12
Rok:
2014
Jazyk:
eng
Abstrakt: To evaluate performance of a scintillation detection system for SEM, it is necessary to consider many scintillator parameters. Various attributes of the scintillator for the SEM electron detector are listed in. The very important parameters are those affecting the detective quantum efficiency (DQE) which is primarily a measure of image noise. Not a less important indicator of image quality is the modulation transfer function (MTF) which describes the ability to show fine image details. Therefore, using a scanning imaging system, the detector bandwidth, which is given especially by the scintillator decay time, is the key to the good MTF. Currently, the YAG:Ce single crystal scintillator (introduced already in 1978 having somewhat limiting decay characteristic is the most frequently used scintillator in the SEM. The aim of this paper is to outline possibilities of scintillator innovation to get the improved MTF and DQE.
Klíčová slova:
cathodoluminescence; DQE; electron detector; MTF; scintillator; SEM; single crystal Číslo projektu: TE01020118 (CEP), EE.2.3.20.0103 Poskytovatel projektu: GA TA ČR, GA MŠk Zdrojový dokument: 18th International Microscopy Congres. Proceedings, ISBN 978-80-260-6720-7
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0238242