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Determination of mechanical properties of thin films by nanocompresion
 Kuběna, Ivo ; Hutař, Pavel ; Náhlík, Luboš ; Kruml, Tomáš
Measurements of mechanical properties of objects with micrometric (or even smaller) dimensions is still not a common task. In this paper, the possibility of evaluation basic mechanical properties of a thin film by nanocompression is demonstrated. Cylindrical specimens with the axis normal to the film plane, attached by the bottom to the substrate, are prepared by the focused ion beam technique. Such pillars are deformed by a nanoindenter outfitted by a flat diamond punch. An equivalent of compression curve is obtained. It is possible to measure directly parameters as the yield stress, stress at a chosen strain level or work hardening rate. Finite elements modelling is necessary for the Young modulus evaluation. It is shown that the Young modulus can be evaluated quite precisely, even if the geometry of the pillar is not perfect.
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