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Testing of MEMS gyroscopes
Hasík, Stanislav ; Vágner,, Martin (referee) ; Klusáček, Stanislav (advisor)
This diploma thesis presents theoretical information regarding MEMS gyroscopes their parameters and designs. The description of measurement chain be used for testing of MEMS gyroscopes in Honeywell International s.r.o. is presented. Special focus is devoted to: the Polytec MSA-500 system, the Standa goniometers and their controller, Peltier cell and its driver. The practical part of this thesis contains the description of the thermal control system and also the description of the developed “Measurement system” in the LabVIEW software which is used for controlling the goniometers position and the Peltier cell. The system is able to fully control two goniometer stages, align the surface of tested MEMS device to orthogonal position with respect to the Polytec MSA-500 measurement head and also control the temperature of the tested device. The last part of this thesis presents the tests of the MEMS gyroscope parameters with special focus to the MEMS gyroscope angle random walk and the bias dependence on the vacuum quality of the structure environment.
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Qualitative comparison of MEMS vibration sensors
Hasík, Stanislav ; Havránek, Zdeněk (referee) ; Klusáček, Stanislav (advisor)
The aim of this bachelor thesis is a qualitative parameter validation of MEMS vibration sensors using calibration devices from the companies SPECTRA a Brüel & Kjr. First part of study deals with different types of MEMS vibration sensors on the piezoresistive, capacitive and thermal principle of operation. The study also deals with primary and secondary methods of calibration of vibration sensors and devices used for these calibration methods. The second part of the thesis is to use the calibration chains and secondary calibration methods to verify the sensitivity and temperature dependences of three particular MEMS accelerometers from the companies STMicroelectronic, MEMSIC and Panasonic. The measured characteristics are compared with catalog datasheets. In the end of the thesis are also discussed the possibility of the suppression these temperature effects.
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System for MEMS Gyroscope Testing
Hasík, Stanislav
This paper presents fundamental information about an apparatus for tests on MEMS gyroscopes. Within the introductory section, the measurement system used to test MEMS gyroscopes at a Honeywell laboratory is characterized; the set-up comprises a Polytec MSA-500 analyzer, goniometers, and a controller. The related practical part then describes an application developed with the LabVIEW software to control the position of the goniometers. Importantly, the discussed system is able to fully control two goniometer stages and to align the MEMS device surface into an orthogonal position with respect to the Polytec MSA-500 measurement unit.
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Qualitative comparison of MEMS vibration sensors
Hasík, Stanislav ; Havránek, Zdeněk (referee) ; Klusáček, Stanislav (advisor)
The aim of this bachelor thesis is a qualitative parameter validation of MEMS vibration sensors using calibration devices from the companies SPECTRA a Brüel & Kjr. First part of study deals with different types of MEMS vibration sensors on the piezoresistive, capacitive and thermal principle of operation. The study also deals with primary and secondary methods of calibration of vibration sensors and devices used for these calibration methods. The second part of the thesis is to use the calibration chains and secondary calibration methods to verify the sensitivity and temperature dependences of three particular MEMS accelerometers from the companies STMicroelectronic, MEMSIC and Panasonic. The measured characteristics are compared with catalog datasheets. In the end of the thesis are also discussed the possibility of the suppression these temperature effects.
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|
|
Testing of MEMS gyroscopes
Hasík, Stanislav ; Vágner,, Martin (referee) ; Klusáček, Stanislav (advisor)
This diploma thesis presents theoretical information regarding MEMS gyroscopes their parameters and designs. The description of measurement chain be used for testing of MEMS gyroscopes in Honeywell International s.r.o. is presented. Special focus is devoted to: the Polytec MSA-500 system, the Standa goniometers and their controller, Peltier cell and its driver. The practical part of this thesis contains the description of the thermal control system and also the description of the developed “Measurement system” in the LabVIEW software which is used for controlling the goniometers position and the Peltier cell. The system is able to fully control two goniometer stages, align the surface of tested MEMS device to orthogonal position with respect to the Polytec MSA-500 measurement head and also control the temperature of the tested device. The last part of this thesis presents the tests of the MEMS gyroscope parameters with special focus to the MEMS gyroscope angle random walk and the bias dependence on the vacuum quality of the structure environment.
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