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National Repository of Grey Literature

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Attaining surface homogeneity in the deposition of complex layer systems Žídek, Karel We report on a procedure of optimization of a thin-film deposition process with respect to the best attainable layer homogeneity on a large deposited surface. By using a deposition mask and rotation of the deposition calotte, we reach the homogeneity of ± 0.5% for samples with the diameter up to 5 cm. Furthermore, we investigate the effect of substrate tilt and of a deposition on a curved lens surface with respect to homogeneity of the deposited layer. Detailed record

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