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X-ray microanalysis in ESEM and LV SEM
 Autrata, Rudolf ; Jirák, Josef ; Špinka, Jiří
The scattering of primary electrons to so-called skirt, appearing in the range of pressures used in regimes of LV SEM (low vacuum) as well as in ESEM, has no substantial influence on the spatial resolution for commonly used types of imaging in the scanning electron microscope. It demonstrates itself just as a higher share of the noise signal. What is more, it brings known substantial advantages, as that no preparation of modification of non-conductive samples is needed and observation of liquid phase containing specimens is made possible.
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