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National Repository of Grey Literature

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Článek charakterizuje způsoby zavedení rastrovací verze LEEM do konvenčního SEM prostřednictvím vložení katodové čočky pod objektiv přístroje. Shrnuty jsou základní vlastnosti rastrovacího LEEMu Novák, Libor ; Müllerová, Ilona Procedure of signal processing in the Everhart-Thornley type of the secondary electron detector in the SEM is analyzed as regards signal statistics, detective quantum efficiency and transport and possible losses of information. Detailed record

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