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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Preparation of SiN ultrathin films
 Dvořák, Martin ; Voborný, Stanislav (referee) ; Mach, Jindřich (advisor)
This bachelor´s thesis deals with design, testing and calibration of an effussion cell generating silicon atomic beam having thermal energy (0,1 - 1 eV). These beams are used for the preparation of Si and SiN ultrathin films. Silicon nitride and its applications in semiconductor industry are reviewed. First experiments with deposition of ultrathin films of Si and SiN are described. These layers have been analyzed by x-ray photoelectron spektroscopy (XPS) and atomic force microscopy (AFM).
Detailed record
Preparation of SiN ultrathin films
 Dvořák, Martin ; Voborný, Stanislav (referee) ; Mach, Jindřich (advisor)
This bachelor´s thesis deals with design, testing and calibration of an effussion cell generating silicon atomic beam having thermal energy (0,1 - 1 eV). These beams are used for the preparation of Si and SiN ultrathin films. Silicon nitride and its applications in semiconductor industry are reviewed. First experiments with deposition of ultrathin films of Si and SiN are described. These layers have been analyzed by x-ray photoelectron spektroscopy (XPS) and atomic force microscopy (AFM).
Detailed record

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