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Mathematical-physical analysis of dynamic pressure for the experimental differentially pumped chamber
Lepltová, Kristýna ; Bílek, Michal (referee) ; Maxa, Jiří (advisor)
This thesis is based on the series of scholarly article dedicated to the issue of pumping in the differential scanning chamber of an environmental scanning microscope. The thesis is based on Danilatos’s study where the pumping of the differential pumped chamber is solved by means of the Monte Carlo statistical method. The thesis analyzes gas flow in the experimental chamber using the Pipot tube. The analyses will be used for the design of the experimental chamber which will serve for the experimental evaluation of the flow results in the chamber using the continuum mechanics.
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Analysis of the impact of the conic aperture placement in the supersonic flow in the differentially pumped chamber
Rous, Miroslav ; Bílek, Michal (referee) ; Maxa, Jiří (advisor)
The thesis is focused on the medium dynamics simulation in the environmental scanning electron microscope. Specifically, it researches (examines) the conical aperture location effect in the differential pumped chamber and the width of the pumping channel in this chamber. The theoretical part deals with the environmental scanning microscope generally and other tools used in this thesis, e.g. ANSYS Fluen software, fluid turbulence, medium free path of molecules and electrons scattering. In the practical part, the work is focused on data processing from the ANSYS Fluent program and on their evaluation.
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Analysis of the gas flow in the passage of the primary electron beam differentially pumped chamber depending on the shape of the nozzle inlet
Hladký, David ; Vaculík, Sebastian (referee) ; Maxa, Jiří (advisor)
It is necessary to separate sample chamber with pressure up to 2000 Pa and the surroundings of tube with pressure 0.01 Pa with help of a differential pumped chamber at the environmental scanning electron microscope This differential pumped chamber is to be designed so that it has to manage to separate sections with very different pressures sufficiently and in the trajectory of transitting (overflying) prime electrons the average value of pressure and density has to be as low as possible, so that it would occure the lowest diffusion of these electrons, which is caused by collisions of electrons and air molecules too. It were created axisymmetric 2D models variant of Differentially pumped chamber with different opening angles of the clone, which were analyzed to choose the best variant. The Ansys Fluent systeme using finite volume method for analysis of fluid flow was used for analysis.
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Analysis of the shape of the intake ports of the current concept differentially pumped chamber
Bílek, Michal ; Vyroubal, Petr (referee) ; Maxa, Jiří (advisor)
This master´s thesis discusses the analysis of the shape of the intake ports of differentially pumped chamber for the current concept. The first part is an introduction to the microscopy issue, then it is focused on ESEM microscopes and it also includes a describtion of the Flow dynamics and a mathematical describtion. In the following chapters the software Solid Works, where the model of differentially pumped chamber is created, and the software Ansys Fluent, which is used for analysis, are described. The second part concerns the proposed concepts and the results of their simulations. At the end of the work the results are analyzed and evaluated.
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Analysis of the gas flow when pumping vacuum for newly designed scintillation detector
Poruban, Milan ; Vaculík, Sebastian (referee) ; Maxa, Jiří (advisor)
The aim of this thesis is to study the issue of eniveromental scanning electron microscopy and pumping gas to create vacuum in the newly designed scintillation detector. Further, creating a model of recently proposed scintillation detector and simulating and analyzing pumping gas in differentially pumped chamber of detector. The theoretical part deals with electron microscopy, electron sources, electron optics and secondary electrons detectors. It is also presented which signals are generated by the electron beam on the surface of a solid. Further fluid flow issues and equations describing the flow in the solved chamber are dismantled. Furthermore, the impact of gaseous environment on the trajectory of primary electrons, because there are collisions of primary beam with atoms and molecules of gas. The following section discusses creating, quality and importance of the network in mathematical modelling. A method of a final volume used to calculate the differential equations describing the flow of gas at the premises of the detector is described . The practical part consists in creating a model of scintillation detector and analyzing the gas flow in drawing a vacuum in the newly designed scintillation detector. At the end the simulation results of gas flow are compared for different variants of apertures and various pressures on the neck of a scintillation detector designed for optimum performance of the detector. The outcome of this thesis is model of newly designed scintillation detector with optimized shapes of apertures according to functional requirements.
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Influence of nozzle angle on gas pressure distribution in the nozzle according to Prandtl's theory
Dostalová, Petra ; Maxa, Jiří (referee) ; Šabacká, Pavla (advisor)
The thesis is focused on issue pressure distribution in the nozzle while pumping the differential pumped chambre of an environmental scanning microcope. The main task of the thesis is to find suitable design of this nozzle respect to Prandtl`s theory. In the theoretical part, there are presented microscopy as science. Afterwards the thesis is focused on environmental scanning electron microscopy and its problem and vacuum system, computer program used for preparation of simulation and study that the experimental part is based on. The experimental part evaluates the results of physical-mathematical analysis of the flow inside and behind the Laval nozzle in the experimental chambre. The results are the basis for the optimal proportions of this nozzle.
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Specifications of the Ansys Fluent Solution Solver for low pressures in EREM
Šimík, Marcel ; Bílek, Michal (referee) ; Maxa, Jiří (advisor)
This thesis is focused on electron microscopy which issue is discussed at the beginning of work. The main attention is dedicated to the Environmental electron microscope, especially the differentially pumped chamber, which the thesis deals with. There is a production of an experimental chamber for analysis of shock waves on going therefore main goal of this thesis was to analyze the flow pattern in this chamber. Using the Ansys Fluent program, simulations of the characteristic flow that arises from the pumping of the vacuum chambers namely the ultrasonic flow at low pressures on which the most suitable turbulent module was applied as well as the degree of discretization was performed. The final analysis of this flow pattern is primarily focused on the localization of the shock wave which experimental evidence is to be lodged by shadow optical method as a part of the new concept of the chamber. The basis for the simulation of the chamber was taken over by Dr. Danilatos, with which the results were compared.
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FLOW ANALYSIS OF THE PRESSURE IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING
Šabacká, Pavla ; Bílek, Michal (referee) ; Maxa, Jiří (advisor)
The thesis deals with the effect of the critical flow, which is produced at pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The thesis compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. Problematics were solved using finite volume method by Ansys Fluent system.
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Pumping analysis in the experimental chamber for electron microscope using ANSYS system
Dostalová, Petra ; Bílek, Michal (referee) ; Maxa, Jiří (advisor)
The thesis is focused on issue of pumping in the differential pumped chambre of an environmental scanning microcope. In the theoretical part, there are presented microscopy as science. Afterwards the thesis is focused on environmental scanning electron microscopy and its problem and vakuum system, computer program used for preparation of simulation and study that the experimental part is based on. The experimental part contains the results of gas flow in the differential pumped chambre. The problematics were solved by Ansys Fluent system.
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Analysis of the influence of the gas flow in the placement of the sample in the chamber of the environmental scanning electron microscope
Bednář, Eduard ; Bílek, Michal (referee) ; Maxa, Jiří (advisor)
This thesis deals with the simulation of fluid dynamics in environmental scanning electron microscope and evaluate solvers setup, the degree of discretization, choice of turbulent model and proposal optimal design of environmental scanning electron microscope. The theoretical part describes the issue of environmental scanning electron microscopy, software SolidWorks and ANSYS Fluent, basic equations describing fluid status, fluid turbulence, the mean free path of molecules and electron scattering. The practical part of the thesis is to create the model of environmental scanning electron microscope AQUASEM II in CAD system SolidWorks and simulation of fluid flow in the sample chamber before aperture PLA1 by ANSYS Fluent. A series of simulations provided the perfect setting solver. These knowledge are used in the second stage of the practical part, where is proposed optimal shape of the table sample and the input aperture PLA1.
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