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Surface and mechanical properties of a-CSi:H and a-CSiO:H films
Plichta, Tomáš ; Shukurov, Andrey (referee) ; Klapetek, Petr (referee) ; Čech, Vladimír (advisor)
The dissertation thesis deals with the preparation and characterisation of a-CSi:H and a CSiO:H thin films prepared using the process of plasma enhanced chemical vapour deposition (PECVD). Tetravinylsilane (TVS) and its mixtures with argon and oxygen were used to deposit films on both planar substrates and fibre bundles. Main characterisation techniques were employed to study the topography of films, namely atomic force microscopy (AFM). Their mechanical properties were studied through nanoindentation; the nanoscratch test was used to assess the film adhesion to the substrate. Other analysed properties were internal stress and friction coefficient. The particular attention was paid to the work of adhesion and its determination. This knowledge was further applied to the preparation of surface treatments of glass fibres and, subsequently, polymer composites. Those were tested using the push-out test and the short beam shear test. Based on the results, the effects of deposition conditions and the relationships between the studied properties and quantities were determined.
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Progressive Amorphous Carbon Alloys Synthesized in Low-Temperature Plasma
Bránecký, Martin ; Trunec, David (referee) ; Kylián,, Ondřej (referee) ; Čech, Vladimír (advisor)
Atomic/plasma polymerization technology is widely used in various technical fields. This work is focused to use the PE-CVD technology in the field of formation of interphase and adhesive layers, which are developed into layered nanostructures. To ensure reproducible chemical and physical properties of the materials, the deposition process was monitored by mass spectrometry. Vapours of the pure tetravinylsilane, or a mixture of these vapours with oxygen, was used as a precursor for atomic polymerization, which results in the thin films with a large variability of properties. Physical and chemical properties were varied by the effective power delivered to the plasma discharge. The deposited films were analyzed from different perspectives using several methods (in situ spectroscopic ellipsometry, FTIR, nanoindentation, AFM). The removal of hydrogen atoms from the carbon-silicon network results in increased crosslinking of the material, which controls the mechanical and optical properties of the deposited layers. From the precisely defined a-CSi:H and a-CSiO:H materials, layered nanostructures composed of 3 and 7 individual layers was subsequently constructed. These nanostructures were analyzed by XPS and RBS to determine the atomic concentrations of carbon, silicon, oxygen and their binding states.
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Surface and mechanical properties of a-CSi:H and a-CSiO:H films
Plichta, Tomáš ; Shukurov, Andrey (referee) ; Klapetek, Petr (referee) ; Čech, Vladimír (advisor)
The dissertation thesis deals with the preparation and characterisation of a-CSi:H and a CSiO:H thin films prepared using the process of plasma enhanced chemical vapour deposition (PECVD). Tetravinylsilane (TVS) and its mixtures with argon and oxygen were used to deposit films on both planar substrates and fibre bundles. Main characterisation techniques were employed to study the topography of films, namely atomic force microscopy (AFM). Their mechanical properties were studied through nanoindentation; the nanoscratch test was used to assess the film adhesion to the substrate. Other analysed properties were internal stress and friction coefficient. The particular attention was paid to the work of adhesion and its determination. This knowledge was further applied to the preparation of surface treatments of glass fibres and, subsequently, polymer composites. Those were tested using the push-out test and the short beam shear test. Based on the results, the effects of deposition conditions and the relationships between the studied properties and quantities were determined.
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Progressive Amorphous Carbon Alloys Synthesized in Low-Temperature Plasma
Bránecký, Martin ; Trunec, David (referee) ; Kylián,, Ondřej (referee) ; Čech, Vladimír (advisor)
Atomic/plasma polymerization technology is widely used in various technical fields. This work is focused to use the PE-CVD technology in the field of formation of interphase and adhesive layers, which are developed into layered nanostructures. To ensure reproducible chemical and physical properties of the materials, the deposition process was monitored by mass spectrometry. Vapours of the pure tetravinylsilane, or a mixture of these vapours with oxygen, was used as a precursor for atomic polymerization, which results in the thin films with a large variability of properties. Physical and chemical properties were varied by the effective power delivered to the plasma discharge. The deposited films were analyzed from different perspectives using several methods (in situ spectroscopic ellipsometry, FTIR, nanoindentation, AFM). The removal of hydrogen atoms from the carbon-silicon network results in increased crosslinking of the material, which controls the mechanical and optical properties of the deposited layers. From the precisely defined a-CSi:H and a-CSiO:H materials, layered nanostructures composed of 3 and 7 individual layers was subsequently constructed. These nanostructures were analyzed by XPS and RBS to determine the atomic concentrations of carbon, silicon, oxygen and their binding states.
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