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National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
The collection efficiency of the ET detector of the secondary electrons in SEM
 Konvalina, Ivo ; Müllerová, Ilona
This work is focused on the simulations of the collection efficiency of the ET detector of the secondary electrons. The influences of the electrostatic and magnetic fields and geometrical parameters, that influence trajectories of secondary electrons, are studied.
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The quantification of the detection efficiency of the secondary electron detector in SEM
 Konvalina, Ivo
This work is focused on the simulations of the collection efficiency of the Everhart-Thornley (ET) detector of the secondary electrons (SE). The aim of this work is to study the influences of the electrostatic and magnetic fields and geometrical parameters in the specimen chamber, that influence the particle transport from the specimen region to the detector.
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