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Material design problems of plasma-chemical reactors for disposal perfluorinated compounds
Brožek, Vlastimil ; Březina, Václav ; Mastný, L. ; Kubatík, Tomáš František ; Živný, Oldřich
Reduction of perfluorinated gases emissions from semiconductor industry has recently introduced a serious problem from both technological and economic side. With respect to chemistry of the decomposition reactions the most effective abatement techniques developed up to now consists in the interaction of those gaseous pollutants with several types of plasmas. In the framework of Czech-Taiwanese bilateral project No. 17-10246J 'Decomposition of Perfluorinated Compounds and Fluorinated Ozone Depleting Substances' a new plasmochemical reactor design is to be solved. In this reactor the plasma abatement process consisting of interaction of the plasma generated by unique watter stabilized H-WSP plasma torch at temperatures ranging\nfrom 2000 K up to 25,000 K with the treated gases will be carried out. However, the main product generated in the reactor during the steam plasma abatement process is hydrogen fluoride which causes corrosion of almost every construction material. The aim pursued by the work presented is to search for the materials resistant to exposition of HF even at high temperatures. To investigate corrosion resistance of construction materials with thermal stability within temperature interval 2700-3000 °C titan nitride, boron nitride, and silicon carbide have been selected. The samples of those materials have been prepared by spark plasma sintering method and exposed to concentrated solution of hydrofluoric acid for which corrosion rates have been measured
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Nitride-based materials in nanotechnologies
Dufek, V. ; Brožek, Vlastimil
The contribution draws attention to the research results of nitrides in the Czech Republic. The nanotechnology of TiN is on the world top, but the state of silicon and boron nitrides production where we in certain sense surpassed the world niveau deceased. PRAMET Šumperk does not continue in cubic BN and OVU Karlštejn in hexagonal BN development. The information from Bayreuth University indicates that nanoclusters of fullerene ACNR (Agregated Carbon NanoRods) can reach the hardness higher than that of diamond. The same is valid for boron nitride superhard materials.
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