|
Design of an effusion cell for the deposition of Sn and Zn ultrathin layers
Horák, Stanislav ; Kolíbal, Miroslav (referee) ; Mach, Jindřich (advisor)
This bachelor thesis deals with the design and the construction of effusion cells for the deposition of zinc and tin ultrathin layers. In the introductory part there is an explanation of principles of eusion cells' functions, like a molecular beam epitaxy (MBE) or a construction of the efussion ow. Furthermore, the work describes a general principles of a ccreation of the atom sources. Theoretical part ends with review about the growth of ultrathin layers and nanostructures of zinc, tin and their compounds. Experimental part provides a design of the effusion cells with radiation heating from silicon carbide and heating by electrons impact. The complete drawing documentation of the designed effusion cells is included in the attachment.
|
|
Development of Atomic- and Ion Beam Sources
Šamořil, Tomáš ; Lencová, Bohumila (referee) ; Mach, Jindřich (advisor)
The objective of this master thesis was to provide the optimization of an ion-atom beam source for the improvement of its properties. The improvement of the parameters increases the efficiency of the source during the deposition of gallium nitride ultrathin films (GaN) being important in microeletronics and optoelectronics. After optimization, the depositions of GaN ultrathin films on Si(111) 7x7 at lower temperatures (
|
|
Design of an effusion cell for the deposition of Sn and Zn ultrathin layers
Horák, Stanislav ; Kolíbal, Miroslav (referee) ; Mach, Jindřich (advisor)
This bachelor thesis deals with the design and the construction of effusion cells for the deposition of zinc and tin ultrathin layers. In the introductory part there is an explanation of principles of eusion cells' functions, like a molecular beam epitaxy (MBE) or a construction of the efussion ow. Furthermore, the work describes a general principles of a ccreation of the atom sources. Theoretical part ends with review about the growth of ultrathin layers and nanostructures of zinc, tin and their compounds. Experimental part provides a design of the effusion cells with radiation heating from silicon carbide and heating by electrons impact. The complete drawing documentation of the designed effusion cells is included in the attachment.
|
|
Development of Atomic- and Ion Beam Sources
Šamořil, Tomáš ; Lencová, Bohumila (referee) ; Mach, Jindřich (advisor)
The objective of this master thesis was to provide the optimization of an ion-atom beam source for the improvement of its properties. The improvement of the parameters increases the efficiency of the source during the deposition of gallium nitride ultrathin films (GaN) being important in microeletronics and optoelectronics. After optimization, the depositions of GaN ultrathin films on Si(111) 7x7 at lower temperatures (
|