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SMV-2023-58: Design of Electron Optical Elements
Radlička, Tomáš
The contractual research covered design of new genration of secondary electron detector for the multibeam scanning electron microscope. We also calculated the electron optical properties of NiCol column with hexapole corrector of spherical aberration.
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Parasitic aberrations of the hexapole corrector of spherical aberration - analysis and corrections
Sopoušek, Jan ; Lencová, Bohumila (referee) ; Radlička, Tomáš (advisor)
Jednou z možností korekce sférické vady v elektronové mikroskopii je hexapólový korektor. Ačkoliv samotný princip korekce je poměrně dobře v literatuře popsán, jen relativně málo je věnováno samotnému seřízení hexapólového korektoru, jež je stěžejní pro správnou funkčnost. Práce je věnována analytickému rozboru vad seřízení a jejich vlivu na rozlišení obrazu za použití metody eikonálu a aberačních integrálů. Je ukázáno, že nejdůležitější roli v parazitických aberací hrají výchylky a náklon hexapólů. V závěru je pak popsáno, jakým způsobem je třeba hexapólový korektor seřídit pro odstranění parazitických vad.
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Electrostatic Deflection and Correction Systems
Badin, Viktor ; Oral, Martin (referee) ; Zlámal, Jakub (advisor)
The aim of this master's thesis is to explore and study dynamic aberration correction options in electron-beam lithography systems. For the calculations, the thesis uses the optical column of the BS600 electron-beam writer. The thesis focuses on corrections of the third order field curvature, astigmatism, and distortion aberrations of the currently used magnetic deflection system and a newly designed electrostatic deflection system. The parameters of the two deflection and correction systems were compared.
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SMV-2021-43: Electron Optical Systems Design and Simulations
Radlička, Tomáš
The contractual research covered several feasibility studies in the field of electron-optical design and simulations. We studied several electron-optical systems, including calculating the electron-optical properties, optimizing the design, and possible integration into the primary beam column. The contractual research also covered development of software packages for the electron optical design and their integration to the Julia language environment.
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SMV-2020-31: Electron Optical Elements Design and Simulations
Radlička, Tomáš
The contractual research covered several feasibility studies in the field of electron-optical design and simulations. We studied several electron-optical elements, including calculating the electron-optical properties, optimizing the design, and possible integration into the primary beam column. We used the differential-algebraic method for the calculation of aberrations and wave-optical calculations for the analysis of resolution. We also analyzed the effect of misalignment aberrations. Besides the electron-optical design, we studied the possibility of the construction of the element with graphene foil.
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Electron optical properties of a new low-energy scanning electron microscope with beam separator
Radlička, Tomáš ; Kolařík, V. ; Oral, Martin
The low energy scanning electron microscope (SEM) which is currently at the Institute of\nScientific Instruments, suffers from low resolution and suboptimal detections systems. In the cathode lens regime, signal electrons are accelerated by the electric field between the sample and the objective lens, getting collimated. Those with low emission angles get through the bore in the BSE detector into the objective lens and cannot be detected by the available detectors now. The information about the sample provided by these electrons is lost, which limits our microscopy methods.\nThese two limitations are to be overcome with a new low-energy SEM, which was developed\nat Delong Instruments. It consists of a field emission gun with the energy width of 0.8 eV, a magnetic condenser lens, and an electrostatic triode objective lens. The acceleration voltage is 5 kV. The sample stage can be biased at up to -5 kV to provide low landing energy without strong decrease of the resolution – the effect of the cathode lens. A beam separator is placed in front of the deflection system for the detection of the signal electrons that get to the column. In a combination with standard detectors and cathode lens, it allows detecting all\nkinds of signal electrons.
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Parasitic aberrations of the hexapole corrector of spherical aberration - analysis and corrections
Sopoušek, Jan ; Lencová, Bohumila (referee) ; Radlička, Tomáš (advisor)
Jednou z možností korekce sférické vady v elektronové mikroskopii je hexapólový korektor. Ačkoliv samotný princip korekce je poměrně dobře v literatuře popsán, jen relativně málo je věnováno samotnému seřízení hexapólového korektoru, jež je stěžejní pro správnou funkčnost. Práce je věnována analytickému rozboru vad seřízení a jejich vlivu na rozlišení obrazu za použití metody eikonálu a aberačních integrálů. Je ukázáno, že nejdůležitější roli v parazitických aberací hrají výchylky a náklon hexapólů. V závěru je pak popsáno, jakým způsobem je třeba hexapólový korektor seřídit pro odstranění parazitických vad.
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Electrostatic Deflection and Correction Systems
Badin, Viktor ; Oral, Martin (referee) ; Zlámal, Jakub (advisor)
The aim of this master's thesis is to explore and study dynamic aberration correction options in electron-beam lithography systems. For the calculations, the thesis uses the optical column of the BS600 electron-beam writer. The thesis focuses on corrections of the third order field curvature, astigmatism, and distortion aberrations of the currently used magnetic deflection system and a newly designed electrostatic deflection system. The parameters of the two deflection and correction systems were compared.
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Schmidt-Cassegrain Telescopes
Jareš, Daniel ; Lédl, Vít ; Rail, Zdeněk
This paper describes analysis of residual aberrations of Schmidt-Cassegrain telescopes (SCT). Though SCTs have been produced for 30 years, problem of imaging properties is only rarely discussed. At first we have performed measurement of optical parameters of several commercially produced SCT telescopes of Meade, Celestron and Carl Zeiss Jena, then we have used measured data to construct the models of these system with the help of Zemax program and evaluate residual aberrations. We have found that it is possible to radically improve these systems by changing entry data.
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