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Preparation of graphene layers by MBE
Čalkovský, Martin ; Bábor, Petr (referee) ; Mach, Jindřich (advisor)
This bachelor's thesis deals with growth of graphene by molecular beam epitaxy (MBE). The theoretical section explains the preperation, properties, and detection methods of the material graphene, and the MBE method of graphene preparation is discussed in detail. In the experimental section, optimization of the sublimation carbon source and its properties are shown. Further experiments dealing with the preparation of graphene on Cu and Ge substrates are also described. The presence of graphene structures is proven by Raman spectroscopy.
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Testing of the new UHV scanning electron microscope and design of its effusion cel
Šárközi, Rudolf ; Mach, Jindřich (referee) ; Bábor, Petr (advisor)
This work focus on the development and the design of the effusion cell that is able to deposit different materials in downward orientation. The Cell itself should be placed into the ultra-vacuum microscope (UHV-SEM) developed in TESCAN company in the collaboration with Institute of Physical Engineering. Theoretical part is devoted to the description of the electron microscope and its, in the future installed, parts, which will be used for the preparation and the analysis of the nanostructures. In this work, the first measurements with the electron microscope are presented, and the influence of mechanical vibrations to image quality is discussed.
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Design of aparature for RF plasma etching
Bárdy, Stanislav ; Bábor, Petr (referee) ; Mach, Jindřich (advisor)
This bachelor's thesis deals with a design of an ICP (Inductively Coupled Plasma) apparatus. The theoretical part consists of a research of a plasmatic graphene surface cleaning. Next are described plasma generation methods and an RF circuit design. The experimental part deals with a construction of the ICP apparatus and the impedance matching box, an optical diagnostics of a plasma discharge and a measurement of PMMA etching parameters (etch rate, roughness) by a spectroscopic reflectometry and an atomic force microscopy.
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Design of the new type of thermal atomic source for oxygen atoms
Šikula, Marek ; Bábor, Petr (referee) ; Mach, Jindřich (advisor)
Ultrathin oxid layers (especially high-k layers) are studied and fabricated by using atomic oxygen sources. These high-k ultrathin layers are integrated into CMOS transistors and DRAM capacitors. In this thesis theory of atomic oxygen beams and ways of theirs creation is summarized. On the basis of the obtained knowledge the engineering design of a unique type of the thermal atomic oxygen source is created. The design was tested by simple experiments. The 3D model and complete engineering drawings are included.
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Upgrade of the UHV manipulator for SIMS and LEIS methods
Dao, Tomáš ; Polčák, Josef (referee) ; Bábor, Petr (advisor)
This bachelor’s thesis deals with the design and the construction of the manipulator, which operates under ultra high vacuum. In the first section, the original design and realization of the manipulator with six motion axis is introduced. Second section deals with the modifications of the manipulator. Advantages and disadvantages of the design are discussed and a new design of the manipulator, based on the experience from manipulator operation, is projected. Section is mainly focused on the design of the sample rotation using a stepper motor working in the ultra high vacuum. The new Faraday cup was also designed and tested. The last section contains the LEIS structural analysis measurement using the manipulator.
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Automatization of TDS data evaluation
Badin, Viktor ; Bábor, Petr (referee) ; Potoček, Michal (advisor)
Tato práce se zabývá automatizací vyhodnocování dat termální desorpční spektroskopie (TDS). Teoretická část pojednává o procesích adsorpce a desorpce atomů a molekul a teplotní závislosti desorpce. Součástí práce je také kvantitativní analýza signálu měřícího přístroje. Hlavním cílem praktické části bylo vytvoření počítačového programu na automatizaci vyhodnocování dat TDS. Popis programu a uživatelská příručka jsou také součástí práce. Proběhlo testování programu na předchozích měření a kinetické parametry desorpce byly zjištěny u několika vzorků.
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Upgrade of the device for depositions by ion beam sputtering
Páleníček, Michal ; Mach, Jindřich (referee) ; Bábor, Petr (advisor)
This thesis deals with concept and realization of device which allows loading without air intake. Vacuum technology and its theoretical bases are discussed as well. Moreover the thesis is based on description of the current deposition chamber and its principles. The main part deals with the description of the concepts of lock and load systems. The first concept that has not been realized is described just briefly. The second one is thorough with description of the individual solutions and methods. The work also contains simple instructions how to install the specimen. At the end are described some outputs of simulations that have been done to comprehend and solve any problems that might occur as specimen holder cooling and deflection of magnetic rod.
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