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National Repository of Grey Literature

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Sondové diagnostiky plazmatického tryskového systému s dutou katodou pro depozice tenkých vrstev TiO.sub.x./sub.. Virostko, Petr ; Hubička, Zdeněk ; Kment, Štěpán ; Adámek, Petr ; Jastrabík, Lubomír ; Tichý, M. Electric probe diagnostics were used to determine plasma parameters of the low pressure low temperature hollow cathode plasma jet system used for TiOx thin films depositions. Lagmuir probe measurements provided electron energy probability function, electron density, and effective electron temperature in the plasma jet for different working conditions. They were compared with measurements of the positive ion current to the negatively biased substrate. The substrate was biased with pulsed DC or RF voltage. Detailed record

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