|
|
The deposition of CaF2 ultrathin layers on graphene substrate
Caesar, Radek ; Nebojsa, Alois (referee) ; Mach, Jindřich (advisor)
This master’s thesis is focused on preparation and analysis of ultrathin CaF2 (calcium fluoride) films on a graphene substrate. CaF2 was deposited in UHV conditions at substrate temperatures in the range from 20 °C to 400 °C. The material was deposited on Si(111) with a native SiO2 layer and on a substrate with a CVD graphene layer. The deposited films were analyzed by XPS, AFM and SEM. Moreover four different sample holders for deposition purposes were designed in this work.
|
|
|
Design of manipulator for ultrahigh electron microscope
Caesar, Radek ; Mach, Jindřich (referee) ; Bábor, Petr (advisor)
The main purpose of this thesis is mechanical design of a manipulator for an ultra-high vacuum scanning electron microscope (UHV SEM), being currently developed by TESCAN ORSAY HOLDING a.s. in cooperation with the Institute of physical engineering FME BUT. The manipulator is supposed to be able to handle with specimens in so-called preparation chamber, which the specimens are put in before placing into the analytic chamber. In the preparation chamber the surface finishing and also other operations are made. In the theoretical part some of the technologies used in vacuum engineering, especially various principles of pressure measurement and gas pumping, are described. Besides, the thesis is focused on a brief description of UHV SEM being developed and the methods of specimen preparation. The practical part deals with the concept and the mechanical design of manipulator itself.
|
|
|
The deposition of CaF2 ultrathin layers on graphene substrate
Caesar, Radek ; Nebojsa, Alois (referee) ; Mach, Jindřich (advisor)
This master’s thesis is focused on preparation and analysis of ultrathin CaF2 (calcium fluoride) films on a graphene substrate. CaF2 was deposited in UHV conditions at substrate temperatures in the range from 20 °C to 400 °C. The material was deposited on Si(111) with a native SiO2 layer and on a substrate with a CVD graphene layer. The deposited films were analyzed by XPS, AFM and SEM. Moreover four different sample holders for deposition purposes were designed in this work.
|
|
|
Design of manipulator for ultrahigh electron microscope
Caesar, Radek ; Mach, Jindřich (referee) ; Bábor, Petr (advisor)
The main purpose of this thesis is mechanical design of a manipulator for an ultra-high vacuum scanning electron microscope (UHV SEM), being currently developed by TESCAN ORSAY HOLDING a.s. in cooperation with the Institute of physical engineering FME BUT. The manipulator is supposed to be able to handle with specimens in so-called preparation chamber, which the specimens are put in before placing into the analytic chamber. In the preparation chamber the surface finishing and also other operations are made. In the theoretical part some of the technologies used in vacuum engineering, especially various principles of pressure measurement and gas pumping, are described. Besides, the thesis is focused on a brief description of UHV SEM being developed and the methods of specimen preparation. The practical part deals with the concept and the mechanical design of manipulator itself.
|
guest ::
