|
|
Ultra-low-energy STEM in SEM
Frank, Luděk ; Nebesářová, J. ; Müllerová, Ilona
Examination of thin samples in TEM or STEM has been performed at hundreds of keV. This energy range offered high resolution but low contrasts which meant that tissue sections had to be contrasted with heavy metal salts. Recent TEM with aberration correctors preserve an acceptable resolution down to 20 keV and provide enhanced contrasts. The LVTEM device is operated at 5 keV on samples thinner than 20 nm. STEM attachments to SEMs have become widespread [3] profiting from an image contrast substantially increasing even for light elements at tens or units of keV. The methods for the preparation of ultrathin sections of various substances are capable of producing layers at and even below 10 nm which enables one to further decrease the energy of the electrons provided the image resolution is maintained. When using the STEM technique virtually all transmitted electrons can be utilised for imaging, while in TEM we are restricted to using electrons capable of forming the final image at acceptable quality. This forces us to narrow the ranges of the angular and energy spreads of electrons that enter the image-forming lenses. Consequently, the STEM technique promises higher contrasts at comparable resolutions. Unlimited reduction of the energy of the illuminating electrons is possible by employing the cathode lens principle. This consists of biasing the sample together with its holder (made flat on both sides) to a high negative potential that retards the incident electrons before they land on the sample surface and accelerates backscattered and transmitted electrons to their respective detectors above and below the sample. Calculations have shown a final spot size only moderately extended even at units of eV so that quality-consistent micrographs can be recorded over the full energy scale.
|
|
|
Scanning Very Low Energy Electron Microscopy
Müllerová, Ilona ; Hovorka, Miloš ; Mikmeková, Šárka ; Pokorná, Zuzana ; Mikmeková, Eliška ; Frank, Luděk
Recent developments in applications of the scanning very low energy electron microscopy in selected branches of materials science are reviewed. The examples include visualization of grains in conductive polycrystals including ultrafine grained metals, identification of the local crystal orientation upon reflectance of very slow electrons, transmission mode with ultrathin free-standing films including graphene, acquisition of a quantitative dopant contrast in semiconductors, and examination of thin surface coverages.
|
|
|
An ultrahigh vacuum scanning low energy electron microscope for surface studies
Müllerová, Ilona ; Frank, Luděk
In the course of recent six years, a complex device for examination of clean and well-defined surfaces with low energy electrons under ultrahigh vacuum conditions has been developed and put into operation. The apparatus is intended for exploration of novel image contrasts, available at landing energies of the scanning primary beam below 100 eV, under a residual pressure in the specimen vicinity in the order of 10.sup.-10./sup. mbar. The instrument consists of three vacuum chambers: the observation chamber, a chamber for in-situ preparations and the loading chamber of the air lock.
|
host ::
RSS.