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Computer controlled SEM Tesla BS 350 with cathode for detection of slow and Auger electrons
Hrnčiřík, Petr
The goal of the experiment is an in-situ comparison of the signals given by Auger and by slow electrons (down to 10 eV) with a high resolution. These open new possibilities of getting information about the material and topographical contrast from real surfaces. A new experimental device was designed for this intention, which is presented in this contribution.

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