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Estimation of mechanical properties of thin films using numerical modelling of experimental tests
Tinoco Navarro, Hector Andres ; Jančo,, Roland (oponent) ; Klusák,, Jan (oponent) ; Hutař, Pavel (vedoucí práce)
Bulge testing is an experimental technique that involves the use of numerical and analytical approaches to characterize the mechanical properties of thin films. This thesis addresses some limitations found in the classical models that describe the behavior of thin films subjected to this test. This required the development of new models and numerical strategies in order to determine several mechanical properties of monolayer and bilayer thin films under different structural conditions, such as elasticity, plasticity, and fracture. By combining finite element analysis and classical analytical solutions, different methodologies for calculating the elastic properties (E and v), residual stresses, yield stress, and fracture toughness were proposed and validated. The mechanical properties of silicon nitride, aluminum, and gold films were characterized using load-deflection experimental data obtained from bulging measurements. The determined properties showed reasonable agreement with materials of known properties, which validated that the proposed methods in this work can be useful for estimating the mechanical properties of freestanding thin films.
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