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National Repository of Grey Literature 12 records found  previous11 - 12  jump to record: Search took 0.00 seconds. 
SMV-2015-35: Development of test speciments for SEM
 Matějka, Milan ; Horáček, Miroslav ; Meluzín, Petr ; Chlumská, Jana ; Král, Stanislav ; Kolařík, Vladimír ; Krátký, Stanislav
Research and development in the field of realisation of precise relief structure for testing imaging of scanning electron microscopes (SEM) using micro-lithographic techniques of recording in the silicon. Development in the field of creating of graphic elements of test structures. Development of improving the quality and accuracy of the calibration structures in terms of technical processes for their preparation.
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SMV-2014-28: Development of test specimens for SEM
 Matějka, Milan ; Horáček, Miroslav ; Meluzín, Petr ; Chlumská, Jana ; Král, Stanislav ; Kolařík, Vladimír ; Urbánek, Michal ; Krátký, Stanislav
The aim of the work was the research/development and realisation of precise relief structure for testing imaging of scanning electron microscopes (SEM) using microlithographic techniques of recording in the silicon. Research includes analysis of graphical input with respect of their use for testing of SEM imaging metric, research of appropriate techniques and procedures suitable for the preparation of relief elements in the silicon with high accuracy and repeatability.
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National Repository of Grey Literature : 12 records found   previous11 - 12  jump to record:
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