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National Repository of Grey Literature

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Transmission of Electrons through Thin Films by Scanning Low Energy Electron Microscopy Müllerová, Ilona ; Hovorka, Miloš ; Fořt, Tomáš ; Frank, Luděk For examination of thin films by transmitted electrons (TE) the Transmission Electron Microscope is used at primary beam energies in hundreds of keV. The Scanning Electron Microscopes (SEM) utilize reflected electrons in order to image surfaces but recently the TE mode has been introduced into SEM at much lower electron energies. Detailed record

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