Home > Search Results: "Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012)"
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National Repository of Grey Literature 1 records found  Search took 0.01 seconds. 
Structuring of diamond films by reactive ion plasma etching
 Domonkos, M. ; Ižák, Tibor ; Proška, J. ; Kromka, Alexander
In this study, two common strategies of diamond film structuring are described. Main focus is on the comparison of top-down and the bottom-up strategies. The top-down strategy is primary related to dry reactive ion etching through masking materials (or even without mask), while bottom-up strategy is based on selective area deposition of diamond film. Several methods of both strategies are demonstrated in details in the article, regarding to their properties and basic principles.
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