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DLC/TI thin films properties prepared by hybrid laser technologies
Mikšovský, Jan ; Jelínek, Miroslav ; Písařík, Petr ; Kocourek, Tomáš ; Remsa, J. ; Jurek, Karel
Layers of diamond-like carbon are usable in many fields of industry as well as in medicine. Many scientific groups have worked with different types of deposition techniques to prepare DLC layers with improved or unique properties. The DLC properties could be improved by various dopations. In this study, we focused on DLC layers doped by titanium, prepared by hybrid laser depositions. Two techniques were used: Dual pulse laser deposition (DualPLD) and pulse laser deposition in combination with magnetron sputtering (PLD/MS). Preliminary tests for morphology, wettability, adhesion, hardness, corrosion, friction and wearability were examined. DLC samples were prepared on Si(100) wafer and on Ti6Al4V alloy substrates with titanium concentration from pure up to 25 at.%. Friction of the prepared layers ranged from 0.09 to 0.18. The films exhibited very low wear for loads 1 N and 2 N.\n
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