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Orientation of Grains in the Al-Mg-Si-Mn Alloy by Scanning Low Energy Electron Microscopy
Müllerová, Ilona ; Matsuda, K. ; Horiba, K. ; Mikmeková, Šárka ; Frank, Luděk
Electron Backscatter Diffraction (EBSD) is a technique allowing the crystallographic infomiation to be obtained from samples in the scanning electron microscope (SEM). The main disadvantages of this method include the specimen tilt by 70°, requiring to operate at large working distances and hence with reduced lateral resolution, and a long acquisition time needed to obtain the full infomnation about grain orientations. However, the crystal orientation can be recognized upon energy dependence of the electron reflectance in the very low energy range. Information can be acquired at a high lateral resolution, high contrast and short acquisition time in a dedicated SEM equipped by the cathode lens.

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