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Preparation of ppHMDSO Thin Films in Capacitively Coupled RF Glow Discharges under Dusty Plasma Conditions
Homola, V. ; Buršíková, V. ; Kelar, L. ; Kelarová, Š. ; Stupavska, M. ; Peřina, Vratislav
The deposition of organosilicone thin films from mixture of hexamethyldisiloxane (HMDSO) and oxygen by using capacitively coupled R.F. glow discharges under dusty plasma conditions was investigated. High resolution topography and mechanical property maps of the prepared films were acquired by using atomic force microscopy techniques. The chemical bond and composition of the deposited films were analyzed by Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The mechanical properties of the films were studied using quasistatic as well as dynamic nanoindentation tests and their surface free energies were evaluated by means of contact angle measuring technique using several testing liquids exhibiting various surface tensions. The thermal stability of the films was studied using thermal desorption spectroscopy. Neural network modelling was used to study the effect of plasma parameters on the hardness of ppHMDSO films
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Deposition and Characerization of Protective DLC Coatings on Viscoelastic Substrates
Buršíková, V. ; Bochníček, Z. ; Franta, D. ; Sťahel, P. ; Kelar, L. ; Buršík, Jiří ; Klapetek, P. ; Bláhová, O. ; Peřina, Vratislav ; Zemek, J. ; Zajíčková, L.
Deposition and characerization of protective DLC Coatings on viscoelastic substrates.
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Studium mechanických vlastností gradovaných amorfních DLC povlaků deponovaných PECVD
Buršíková, V. ; Stoica, A. ; Sobota, Jaroslav ; Grossman, Jan ; Fořt, Tomáš ; Klapetek, P. ; Buršík, Jiří ; Peřina, Vratislav ; Bláhová, O.
For optimisation of performance of the coating there is necessary to optimise the following materials parameters: the elastic modulus, hardness, surface strength, film fracture toughness and film-substrate adhesion. We proposed to protect the substrate surface with graded coating, which has monotonically graded elastic modulus and Poisson's ratio.
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Amorfní tenké vrstvy Ag-Sb-S připravené radiofrekvenčním magnetronovým naprašováním
Gutwirth, J. ; Wágner, T. ; Drašar, Č. ; Beneš, L. ; Vlček, M. ; Hrdlička, M. ; Frumar, M. ; Schwarz, J. ; Tichá, H. ; Peřina, Vratislav
Thin Ag-Sb-S films were prepared by RF magnetron sputtering as potential candidates for rewritable optical data storage films. There were prepared polycrystalline bulks of AgSbS2. Composition and homogeneity of these bulks were checked. Targets for RF magnetron sputtering were prepared from pulverized bulks by hot pressing technique. Targets were characterized the same way as bulks. Composition and homogeneity of prepared thin films were characterized by SEM-EDX and RBS/ERDA, amorphous/crystalline character was studied by XRD. Optical properties (spectral dependence of refractive index) were evaluated on basis of UV-Vis-NIR spectroscopy and variable angle spectral ellipsometry (VASE). Crystallization abilities were traced by thermal dependence of optical transmission of prepared thin films.
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