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Interferometric System for Length Calibration on a Metre Scale
Jedlička, Petr ; Mikel, Břetislav ; Řeřucha, Šimon ; Matěj, Z. ; Herman, O. ; Holá, Miroslava ; Jelínek, Michal ; Pavelka, Jan ; Číp, Ondřej ; Lazar, Josef
Interferometric system is designed to calibrate the measurement frame, used for periodic assessment of the inner geometry of the reactor active zone chassis. Calibration lenght is up to 3300mm.
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Grazing incidence interferometer for form measurement of hollow cylinders
Šarbort, Martin ; Řeřucha, Šimon ; Holá, Miroslava ; Lazar, Josef
Optical metrology of cylindrical specimens represents an interesting task in scientific and\nindustrial practice. The most precise measurement methods use principles of laser\ninterferometry where the phase difference between the reference wave and the object wave reflected from the tested surface is detected. The form measurement of hollow cylindrical tubes can be advantageously realized by an object wave with conical wavefronts generated by an axicon lens or an equivalent diffractive optical element. An axicon characterized by large apex angle forms a conical wave that fulfills the conditions of the grazing incidence, which results in suppression of the speckle noise. The previous experimental setups were relatively complex since they involved a pair of mutually reversed axicons or a pair of diffractive optical elements that transform the object wave from planar to conical and vice\nversa.
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SMV-2017-22: Development of a multiaxis interferometric system of coordinate measurement
Holá, Miroslava ; Lazar, Josef ; Hucl, Václav ; Čížek, Martin
The aim of the project of the contractual research was development of a multiaxis interferometric system for coordinate measurement. This system make possible to contactless measurement of displacement in axis x, y with compensation refractive index of air. The emphasis was placed on with high accuracy and repeatability measurement on nanometre level for wavelength 633 nm. Part of the contractual research was development and realization driving system for detection of signals. We used homodyne detection system. The measurement system was tested in laboratory and then was installed in the aim system.
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Advanced Interferometric Methods of Coordinates Measurement
Holá, Miroslava ; Klapetek,, Petr (referee) ; Mrňa, Libor (referee) ; Lazar, Josef (advisor)
This thesis addresses particular topics in the field of the length metrology for nanometrology. Nanometrology deals with dimensional measurements of micro- and nanostructures with a high spatial resolution. It typically combines a microscope imaging with a precise coordinate measurement, usually capable of nanometre resolution using the state-of-art laser interferometry techniques. The development in this field is driven, among others, by emerging advanced nanotechnologies that demand to push further the capabilities and limits of the interferometric techniques to make the nanometre-level dimensional measurement of nanostructures possible. The principal limitations of current systems are the environmental conditions and especially the fluctuations in the refractive index of air. The theoretical part of this thesis aim at analysis of individual parts of laser interferometer. I oriented myself on the study of their advantages/disadvantages and further also the possibilities of their industrial applications. The second part of the thesis presents my work that focused on the influence of the refractive index of air (RIA) on the measurement uncertainty. I experimentally demonstrated an interferometric system with a self-cancellation RIA fluctuations: a transparent photodetector is used for the measurement of the standing wave along the axis of a passive resonator, where the resonator also serves as a reference for the laser wavelength stabilisation. Another optical arrangement, based on a setup of several Michelson interferometers, represents a combination of an interferometer and a refractometer into a single system. This setup was used to study the behaviour of the ambient airflow with respect to the optical path difference and physical separation of the interferometer’s and refractometer’s path. Based on the experimental results I proposed new arrangements for shape measuring interferometers, which combine length interferometry and a tracking refractometer for the direct compensation of RIA fluctuations with geometrically adjacent optical beams. The results indicate an improvement in RIA fluctuation induced uncertainty by a factor of 100. Third part describes the design and implementation of interferometric systems for specific applications. For the industrial environment I developed a compact interferometric displacement gauge which is designed to allow nanometre level measurement using a simplified interferometer construction. For coordinate measurement of the position of the sample up to six degrees of freedom, I realised a compact modular interferometric system, which represents a unique setup together with a stabilised laser source. To measure the position of the sample in an electron beam writer chamber, I designed and implemented a differential interferometer that works in the near infrared domain and uses a new detection method developed for this system. In the fourth part I describe the realisation of a high-speed interferometer with a differential arrangement, which allows evaluation of high-cycle fatigue in material engineering. This method of studying high-cycle fatigue should be beneficial for both the basic research and the engineering practice.
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Frequency stabilized semiconductor laser source for high-resolution interferometry
Řeřucha, Šimon ; Hucl, Václav ; Holá, Miroslava ; Čížek, Martin ; Pham, Minh Tuan ; Pravdová, Lenka ; Lazar, Josef ; Číp, Ondřej
We have assembled an experimental iodine stabilized Distributed Bragg Reflector (DBR) diode based laser system lasing at a wavelength that is in a close proximity to the wavelength of a stabilized He-Ne lasers traditionally used for metrological applications (λ=632.9 nm in vacuum). The aim was to verify whether such a system could be used as an alternative to the He-Ne laser while yielding wider optical frequency tuning range, higher output power and high frequency modulation capability. We have measured the basic characteristics of the laser source and then we have compared the performance of the laser system with that of a traditional frequency stabilized He-Ne laser with a series of experimental arrangements similar to those usually found in laser interferometry and displacement metrology applications. The results indicate that DBR diode laser system provides a good laser source for applications in dimensional (nano)metrology since it provides more output power and advanced tunability options than stabilized He-Ne lasers while maintaining fundamental requirements such as the frequency stability, coherence length and also a defined traceability.\n\n
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A pair of phase-synchronized semiconductor lasers for length metrology
Hucl, Václav ; Holá, Miroslava ; Čížek, Martin ; Řeřucha, Šimon ; Pham, Minh Tuan ; Pravdová, Lenka ; Lazar, Josef ; Číp, Ondřej
Semiconductor lasers are increasingly widespread in areas that have been so far dominated by He-Ne lasers. One of such areas is the length metrology, where He-Ne laser operating at 633nm wavelength is still a traditional source of coherent light for laser interferometers distance measuring. The advantages of semiconductor lasers compared with He-Ne laser are greater optical power and a significantly wider range of wavelength tuning without mode jumps. Another advantage is the possibility of frequency modulation of wavelength of the laser diode by directly changing the injection current. The benefits predetermine these laser diodes for the realization of dual-frequency laser sources for heterodyne interferometry. In this case, using a phase-locked loop technique the optical frequency of a laser diode is locked to the optical frequency of another laser diode with a certain frequency offset in the MHz order. In our contribution we present utilization of DBR laser diodes in implementing a dual-frequency laser source for laser interferometry with heterodyne detection.\n
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SMV-2015-21: Optical frequency reference for visible spectral range
Lazar, Josef ; Hrabina, Jan ; Holá, Miroslava ; Oulehla, Jindřich ; Pokorný, Pavel
The content of this contractual research project for the institute of biophysical chemistry was a research and development of an optical frequency reference for the stabilization of a laser for spectroscopy in the visible spectral range. Spectroscopy measurements with a stabilized laser improve significantly the precision of the measurement thanks to direct traceability of the optical frequency to specific transitions in a suitable absorbing media that are listed in the recommendations of the international metrology commission. The reference is represented by a medium of ultrapure vapour of molecular iodine filed into a cell. The optical design of the cell includes windows with antireflexion coatings and a design with multipass arrangement.
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