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Upgrade of the device for depositions by ion beam sputtering
Páleníček, Michal ; Mach, Jindřich (referee) ; Bábor, Petr (advisor)
This thesis deals with concept and realization of device which allows loading without air intake. Vacuum technology and its theoretical bases are discussed as well. Moreover the thesis is based on description of the current deposition chamber and its principles. The main part deals with the description of the concepts of lock and load systems. The first concept that has not been realized is described just briefly. The second one is thorough with description of the individual solutions and methods. The work also contains simple instructions how to install the specimen. At the end are described some outputs of simulations that have been done to comprehend and solve any problems that might occur as specimen holder cooling and deflection of magnetic rod.
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Analysis of advanced materials and structures by SIMS method
Holeňák, Radek ; Kalousek, Radek (referee) ; Bábor, Petr (advisor)
Bachelor theasis deals with the study of advanced materials by SIMS method and the possibilities of kvantitative analysis using maesured data. Chemical analysis of the ceramic surface in order to optimize the measurement conditions was performed. The rest of the work uses the data output from the measurement to describe the internal microstructure of the material. Using sophisticated methods, Si precipitates in the AlSi layer are localized and described, and the formation of the MgAl2O4 phase in ceramic samples is confirmed. Achieving all the set goals reveals the potential of the SIMS method and, above all, the possibility of processing the data output from the measurements.
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Development of the sample holder for electrical diagnostics in UHV SEM
Axman, Tomáš ; Pavera, Michal (referee) ; Bábor, Petr (advisor)
This bachelor thesis focuses on design and testing of a sample holder enabling for cooling and heating of the sample in ultra-high vacuum apparatus for scanning electron microscope, developed in cooperation with Tescan company. In the theoretical part the currently used sample holders in similar UHV systems are described and their positives and negatives are discussed including material selection. The experimental part describes designing of the sample holder with respect to the required number of electrical contacts for measuring electrical properties of the samples and UHV compatibility. Measurement and testing of the manufactured sample at low and high temperatures is presented.
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Design of aparature for RF plasma etching
Bárdy, Stanislav ; Bábor, Petr (referee) ; Mach, Jindřich (advisor)
This bachelor's thesis deals with a design of an ICP (Inductively Coupled Plasma) apparatus. The theoretical part consists of a research of a plasmatic graphene surface cleaning. Next are described plasma generation methods and an RF circuit design. The experimental part deals with a construction of the ICP apparatus and the impedance matching box, an optical diagnostics of a plasma discharge and a measurement of PMMA etching parameters (etch rate, roughness) by a spectroscopic reflectometry and an atomic force microscopy.
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Electron tweezer
Štubian, Martin ; Šik, Ondřej (referee) ; Bábor, Petr (advisor)
Táto práca sa zaoberá novým spôsobom manipulácie mikro a nano objektov, konkrétne tekutých AuGe ostrovčekov pomocou elektrónového zväzku. V prvej časti je diskutovaný mechanizmus manipulácie, je popísaný princíp a ďalej sú uvedené experimenty a simulácie potvrdzujúce tento princíp. Druhá časť práce sa zaoberá využitím uvedenej manipulácie k tvorenie mikro/nano štruktúr.
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Study of chemical cleaning of surfaces by LEIS method
Staněk, Jan ; Polčák, Josef (referee) ; Bábor, Petr (advisor)
This thesis deal with studying chemical etched surfaces of cadmium telluride crystals (CdTe crystals) by low-energy ion scattering spectroscopy (LEIS method). In the theoretical part, there is description of physical essence of LEIS method, including experimental arrangement of Qtac100 instrument, on which the experiment is measured. The LEIS method is also compared with X-ray photoelectron spectroscopy (XPS). There is summary of properties and structure of CdTe crystals including principle of X-ray detectors, which are the primary use of the crystals. In experimental part there is a description of measuring process, starting with a calibration measurement, ongoing with a chemical etching and ending with a surface analysis. There are examples of LEIS spectra with comments and interpretation including comparison with XPS data.
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Calibration of SIMS method by implantation profiles
Janák, Marcel ; Průša, Stanislav (referee) ; Bábor, Petr (advisor)
This bachelor thesis is concerned with a quantitative analysis of the dopant (C, H, Mg, O) distribution in MOCVD-grown AlGaN HEMTs by TOF.SIMS 5 instrument with cesium and oxygen sputtering. The main reason for the development of RSF SIMS measurement quantification method is a hardly predictable phenomenon of preferential sputtering and matrix effect. Calibration samples, prepared by ion implantation technique into homogeneous and periodic III-nitride AlN, GaN structures, are reproduced by an ion-atom interaction program TRIM. A part of this work is likewise a quantification of AlGaN matrix.
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Surface modification by nano-droplets controlled by electron tweezers
Dao, Radek ; Šik, Ondřej (referee) ; Bábor, Petr (advisor)
This master's thesis is focused on the study of the consequences of electron beam induced motion of Au-Ge alloy nanodroplets on germanium surface. The text consists of two parts. The theoretical part gives an overview of measurement and fabrication techniques used for the experiments. The description of these techniques is mainly focused on topics needed to understand the ideas behind the experiments and their results. The topics covered here are the Atomic Force Microscopy, Scanning Electron Microscopy and Electron Beam Lithography. These are followed by an introduction to the gold-germanium material system and the movement of Au-Ge alloy nanodroplets. The practical part gives a roughly chronological guide throughout the whole experimental process, including the search for a suitable sample fabrication method, the surface modification itself and its measurement. Temperature calibration of the heating system is also mentioned.
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Optimization of UHV SEM for nanostructure study in wide temperature range
Axman, Tomáš ; Zigo,, Juraj (referee) ; Bábor, Petr (advisor)
This diploma thesis deals with the optimization of ultra-high vacuum scanning electron microscope - UHV SEM, which is developed within the Amispec project in cooperation with BUT, Institute of Scientific Instruments of the Czech Academy of Science and Tescan Brno, s.r.o. The theoretical part deals with the description of the actual state of the developed equipment and the research of competing systems. The next part describes the optimization of the sample holder and the pallet receptor for studying nanostructures over a wide range of temperatures. Part of the optimization is the sapphire thermal diode development and experimental verification of the functionality of the designed components. This is followed by the verification of the functionality of the whole system for the transport of samples to the UHV area, deposition with effusion cell and in-situ observations.
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