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Thin films prepared in RF glow discharge and their physico-chemical properties
Bránecký, Martin ; Boušek, Jaroslav (referee) ; Čech, Vladimír (advisor)
Theoretical part of this master thesis was focused on literature recherché dealing with the formation of thin films, plasma, plasma analyses using mass spectrometry and plasma polymerization. Further, this section describes the analysis of thin films using optical methods such as spectroscopic ellipsometry and FT-IR spectrometry. Experimental part describes the materials which are used for the preparation of thin films as well as a description of the equipment for preparation of thin films using a technology of plasma-enhanced chemical vapor deposition (PE-CVD). Control of deposition conditions and monitoring of plasma with its products result in high reproducibility of thin films. The last part of the thesis describes the results of measurement of the first group of samples and their ellipsometric, mass spectrometry and FT-IR evaluation with respect to the deposition conditions.
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Deposition and optical properties of thin films and layered structures by PECVD
Kucharčík, Jan ; Boušek, Jaroslav (referee) ; Čech, Vladimír (advisor)
Thesis in theoretical part is focused on the principle of spectroscopic ellipsometry and formation of thin films by plasma-enhanced chemical vapor deposition (PECVD). In the experimental part we describe the deposition system, ellipsometer and mathematical evaluation of ellipsometric data, materials used for film formation and processing of the samples. Single-layer and multilayer structures of polymeric materials were prepared. We revealed that the optical properties of thin films are independent of film thickness. We also described the effect of the effective power and deposition gas mixture on optical properties of thin films.
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Mechanical response of long-fiber-reinforced polymer composite
Škriniarová, Nina ; Prokeš, Jan (referee) ; Čech, Vladimír (advisor)
This diploma thesis is focused on monitoring of mechanical response of long-fiber reinforced polymer composite. Main part of this thesis was preparation of long-fiber reinforced composite specimens, on which matrix was reinforced by commercially sized glass fibers. For comparison of properties were prepared specimens reinforced by unsized glass fibers. Apart from preparing specimens reinforced by long glass fibers were prepared specimens contains long carbon fibers. For evaluation of mechanical response of the prepared composite specimen were used flexural test and short beam shear test. Mechanical response was evaluated with universal testing machine ZWICK Z010 and data were processed in OriginPro 8 program. Thanks to evaluation of the mechanical response of the prepared specimens was assessed adhesion to fiber-matrix interface. By examining the mechanical response or adhesion can be assessed efficiency of commercial fiber surface treatment and so standardize measurement to compare other options of surface treatments.
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Plasma-enhanced chemical vapor deposition using TVS/Ar and TVS/O2 mixtures
Sadílek, Jakub ; Salyk, Ota (referee) ; Čech, Vladimír (advisor)
Tato studie je zaměřena na základní výzkum přípravy a-SiC:H a a-SiCO:H slitin plazmových polymerů pomocí metody plazmochemické depozice z plynné fáze (PE-CVD). Tyto slitiny byly připravovány depozicí z monomeru tetravinylsilanu (TVS) a jeho směsí s kyslíkem a argonem při různých efektivních výkonech pulzního plazmatu. Připravené tenké vrstvy byly za účelem získání závislostí optických, mechanických a chemických vlastností na depozičních podmínkách zkoumány pomocí metod spektros-kopické elipsometrie (ELL), nanoindentace (NI), fotoelektronové spektrometrie (XPS) a Fourierovy transformované infračervené spektrometrie
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Plasmachemical processing of fibrous reinforcements for polymer composites
Knob, Antonín ; Lapčík, Ĺubomír (referee) ; Čech, Vladimír (advisor)
The diploma thesis is aimed at coating of glass fibers using tetravinylsilane as a monomer by Plasma-Enhanced Chemical Vapor Deposition (PECVD). The surface modified fibers were used as reinforcements for unsaturated polyester resin to form composites of controlled interphase. Chemical and mechanical properties of thin films were controled by the effective power. Determination of fiber-matrix adhesion and an influence of polymer-interface on mechanical properties of composites were characterized by Scanning Electron Microscopy (SEM) and microindentation technique using Interfacial Testing System (ITS) enabling to measure the interfacial shear strength.
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Surface analysis of xGnP/PEI nanocomposite
Červenka, Jiří ; Klapetek, Petr (referee) ; Čech, Vladimír (advisor)
Tato Diplomová práce se zabývá povrchovou analýzou nanokompozitní folie polyetherimidu (PEI) vyztuženého exfoliovanými grafitickými nanodestičkami (xGnP). Analyzovány byly take vzorky nevyztužené PEI folie a samostatné nanodestičky. Vzorky nanokompozitu a PEI folie byly plazmaticky leptány s využitím argonového plazmatu po dobu 1, 3 a 10 hod. Skenovací elektronová mikroskopie (SEM) byla použita pro charakterizaci samostatných nanodestiček rozptýlených na křemíkovém substrátu, původních či leptaných vzorků PEI folie a nanokompozitu. Nanodestičky byly identifikovány při povrchu leptané nanokompozitní folie. Mikroskopie atomárních sil (AFM) byla použita pro zobrazení povrchové topografie separovaných nanodestiček a odkrytých destiček při povrchu leptaného kompozitu. Povrchová drsnost (střední kvadratická hodnota, vzdálenost nejnižšího a nejvyššího bodu) leptaného nanokompozitu narůstala s prodlužující se dobou leptání. Akustická mikroskopie atomárních sil (AFAM) byla použita pro charakterizaci elastické anizotropie leptaných kompozitních vzorků. Nanoindentační měření umožnila charakterizaci lokálních mechanických vlastností PEI a nanokompozitních folií.
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Plasma-enhanced chemicial vapor deposition
Žák, Luboš ; Salyk, Ota (referee) ; Čech, Vladimír (advisor)
Theoretical part of diploma thesis was focused on the search of the state of knowledge in the area of plasma, plasma polymerization and characterization of thin films. Plasma-enhanced chemical vapor deposition (PECVD) was described in the experimental part together with selected analytical techniques. The technology with high level of reproducibility was reached by precise control of deposition conditions, monitoring of plasma, and analysis of plasma products using mass spectrometry. The obtained results demonstrated that the elemental composition, chemical structure, optical and mechanical properties of films were influenced by effective power used.
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Adhesion characterization of thin plasma-polymer films
Pálesch, Erik ; Klapetek, Petr (referee) ; Čech, Vladimír (advisor)
The diploma thesis deals with characterization of adhesion of plasma polymer films deposited on silicon wafers. The samples included organosilicon thin films based on tetravinylsilane monomer prepared by plasma-enhanced chemical vapour deposition. Scratch test was used to characterize film adhesion employing nanoindentation measurements. Adhesion of plasma polymer films of different mechanical properties and film thickness was analyzed by normal and lateral forces, friction coefficient, and scratch images obtained by scanning probe microscope working in atomic force microscopy mode.
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Self-assembled layers based on silicon
Bábík, Adam ; Veselý, Michal (referee) ; Čech, Vladimír (advisor)
Thin film deposition, characterization and properties of self-assembled monolayers based on silicon were studied with emphasis on the SA monolayers deposited from vinyltriethoxysilane and vinyltrichlorsilane. The thesis is aimed at basic properties of the SA monolayer and explanation of its growth. Methods and techniques used for analysis of the monolayer were described as well. Contact angle measurements and an evaluation of the surface free energy are depicted in details. The deposited SA layers were observed with respect to their chemical composition and surface morphology by X-ray photoelectron spectroscopy (XPS), ellipsometry and atomic force microscopy (AFM).
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Formation of layered structures using PE CVD technique
Hoferek, Lukáš ; Krčma, František (referee) ; Čech, Vladimír (advisor)
The work is aimed at preparation and characterization of thin films deposited by Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) on silicon wafers. A comprehensive characterization of the deposition system in order to determine the range of deposition conditions was a part of the study. Subsequently, the single and multi-layers were deposited from tetravinylsilane monomer. The deposition process was monitored by spectroscopic ellipsometry and mass spectroscopy. Layers and layered structures were characterized by microscopic and spectroscopic techniques. The physical and chemical properties of deposited films were studied with respect to the deposition conditions and monomer fragmentation in low-temperature plasma.
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