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National Repository of Grey Literature

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Development of Atomic- and Ion Beam Sources Šamořil, Tomáš ; Lencová, Bohumila (referee) ; Mach, Jindřich (advisor) The objective of this master thesis was to provide the optimization of an ion-atom beam source for the improvement of its properties. The improvement of the parameters increases the efficiency of the source during the deposition of gallium nitride ultrathin films (GaN) being important in microeletronics and optoelectronics. After optimization, the depositions of GaN ultrathin films on Si(111) 7x7 at lower temperatures ( Detailed record

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