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National Repository of Grey Literature

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SMV-2020-30: Deposition technology and implementation of layer system on high temperature polymer Fořt, Tomáš We have developed deposition technology and implementation of layer systems deposited on high temperature polymer. We proved compatibility of the high temperature polymer with PVD technology we used. Sputtering requires high vacuum background pressure, it means that polymer material when heating during sputtering must not leak gases. Detailed record

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