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National Repository of Grey Literature

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Comparison of techniques for diffraction grating topography analysis Matějka, Milan ; Rek, Antonín ; Mika, Filip ; Fořt, Tomáš ; Matějková, Jiřina There are a wide range of analytical techniques which may be used for surface structure characterization. For high resolution surface investigations, two commonly used techniques are Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Both techniques are capable resolve surface structure down to the nanometer in scale. However the mechanism of topography imaging and type of information acquired is different. Detailed record

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