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Electrical properties of nanostructured TaxOy for capacitive applications
Nováková, Tereza ; Boušek, Jaroslav (oponent) ; Šimůnková, Helena (vedoucí práce)
The aim of thesis was to study and describe various charge transport mechanisms present in a tantalum capacitor. The study comprises a theoretical introduction with a short description of a capacitor as an element and follows with conduction mechanisms such as ohmic, Schottky, Poole-Frenkel, tunneling, thermionic emission and space charge current components. Current-voltage (I/V) dependency, impedance characteristics as well as current-time (I/t) dependencies were measured. Obtained data was then analyzed utilizing e.g. the Mott-Schottky analysis and utilized in computations aiming to obtain electrical properties of the structure, such as the activation energy, dopant concentration, accumulation capacitance or potential barrier. The results, computed parameters and measured parameters are then discussed.
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