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Geometrical aspects of connection between surface reggedness and resistance of thin films
Franc, J. ; Janda, Pavel ; Novotný, Jan
The relationship between the ruggedness of substrate surface and the resistance of sputtered NiCr films was studied. The geometrical model in which the surface unevenness is simulated by pyramid was derived. The increase of R/ on a rugged surface in comparison with a polished one was calculated. Ruggedness on real surfaces was analysed by means of AFM microscopy. Obtained data were compared with the model.

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