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Ultrahigh vacuum scanning low energy electron microscope (UHV SLEEM) for surface studies
Müllerová, Ilona ; Frank, Luděk
The aim of project is to study clean and well-defined surfaces via interaction of electrons at energies from 0 to 25 keV with a high spatial resolution. During the period 1995-2001 we have built an Ultrahigh Vacuum Scanning Low Energy Electron Microscope for surface studies. The image resolution below 50 nm can be achieved at 10 eV. The residual pressure in the specimen vicinity is 10.sup.-10./sup. mbar. The paper briefly describes main parameters of the instrument.

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