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SMV-2016-03: Precise relief structures
Matějka, Milan ; Horáček, Miroslav ; Meluzín, Petr ; Chlumská, Jana ; Král, Stanislav ; Kolařík, Vladimír ; Krátký, Stanislav ; Fořt, Tomáš ; Oulehla, Jindřich ; Šerý, Mojmír
Research and development in the field of precise relief structures using electron beam lithography and other ultra-precise micro manufacturing techniques.
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