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MEMS microhotplate platform for chemical sensors
Vančík, Silvester ; Svatoš, Vojtěch (oponent) ; Prášek, Jan (vedoucí práce)
This master’s thesis deals with design and fabrication of MEMS microhotplate platform for chemical gas sensors. The theoretical part describes MEMS, sensors and processes and technologies needed for fabrication of micro hotplate. The practical part includes simulations, masks and step by step microhotplate fabrication. Fabricated heating membrane was characterized and compared to theoretical values from simulations and to similar devices presented in literature.
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Printed Biosensor Based on Organic Electrochemical Transistor
Omasta, Lukáš ; Mikula, Milan (oponent) ; Boušek, Jaroslav (oponent) ; Salyk, Ota (vedoucí práce)
Organic electronic devices arise as a suitable solution for bioelectronics sensor development, due to the good biocompatibility of organic semiconductors. So-called biosensors can convert electrochemical processes into an electronic signal. A matrix of such biosensors can simultaneously scan a number of biological samples or tissues of the living systems. The active part of the device is an Organic Electrochemical Transistor (OECT). In this work, the theoretical background on such device and its characterization, application in cell-based biosensors, methods of fabrication together with the current state of the art in the field of organic electronics are discussed. The experimental part contains specific manufacturing procedures of OECT devices development employed. The main emphasis is given on the ability of produced devices to detect response and monitor the stimulation of electrogenic cells. To this end, microplate patterns with a multielectrode array of OECTs based on the semiconductive polymer PEDOT:PSS was developed and fabricated using conventional printing methods (inkjet printing and screen printing). Standard lithographic procedures were also employed. The latest devices with the highest achieved signal amplification of g = 2.5 mS and the time constant of t = 0.15 s were produced. These are comparable or even better than some state of the art fully lithographically prepared ones.
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Vytváření trenčů o submikronové šířce pro moderní výkonové součástky
Bolcek, Martin ; Jankovský, Jaroslav (oponent) ; Szendiuch, Ivan (vedoucí práce)
Tato diplomová práce je zaměřena na optimalizaci procesu fotolitografie při výrobě polovodičových výkonových součástek. V úvodu je popsán přechod kov-polovodič a s ním související příkopová Schottkyho dioda. Následně je uveden popis dílčích kroků procesu fotolitografie, který tvoří teoretický základ pro testování parametrů fotolitografie. Cílem diplomové práce je optimalizace nastavení procesu fotolitografie pro výrobu trenčů o šířce pod 0,5 µm a její ověření v rámci výrobního bloku struktury trenčů. Práce probíhala ve spolupráci s firmou ON Semiconductor Czech Republic, s.r.o. v Rožnově pod Radhoštěm.
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Vytváření trenčů o submikronové šířce pro moderní výkonové součástky
Bolcek, Martin ; Jankovský, Jaroslav (oponent) ; Szendiuch, Ivan (vedoucí práce)
Tato diplomová práce je zaměřena na optimalizaci procesu fotolitografie při výrobě polovodičových výkonových součástek. V úvodu je popsán přechod kov-polovodič a s ním související příkopová Schottkyho dioda. Následně je uveden popis dílčích kroků procesu fotolitografie, který tvoří teoretický základ pro testování parametrů fotolitografie. Cílem diplomové práce je optimalizace nastavení procesu fotolitografie pro výrobu trenčů o šířce pod 0,5 µm a její ověření v rámci výrobního bloku struktury trenčů. Práce probíhala ve spolupráci s firmou ON Semiconductor Czech Republic, s.r.o. v Rožnově pod Radhoštěm.
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Printed Biosensor Based on Organic Electrochemical Transistor
Omasta, Lukáš ; Mikula, Milan (oponent) ; Boušek, Jaroslav (oponent) ; Salyk, Ota (vedoucí práce)
Organic electronic devices arise as a suitable solution for bioelectronics sensor development, due to the good biocompatibility of organic semiconductors. So-called biosensors can convert electrochemical processes into an electronic signal. A matrix of such biosensors can simultaneously scan a number of biological samples or tissues of the living systems. The active part of the device is an Organic Electrochemical Transistor (OECT). In this work, the theoretical background on such device and its characterization, application in cell-based biosensors, methods of fabrication together with the current state of the art in the field of organic electronics are discussed. The experimental part contains specific manufacturing procedures of OECT devices development employed. The main emphasis is given on the ability of produced devices to detect response and monitor the stimulation of electrogenic cells. To this end, microplate patterns with a multielectrode array of OECTs based on the semiconductive polymer PEDOT:PSS was developed and fabricated using conventional printing methods (inkjet printing and screen printing). Standard lithographic procedures were also employed. The latest devices with the highest achieved signal amplification of g = 2.5 mS and the time constant of t = 0.15 s were produced. These are comparable or even better than some state of the art fully lithographically prepared ones.
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Photolitography on flexible substrates
Urbánek, M. ; Urbánek, P. ; Kuřitka, I. ; Kolařík, Vladimír
Nowadays preparation of structures on flexible substrates is highly demanded because of using this patterns in field of flexible electronics. This contribution deals with photolitographic procces for preparation of structures on flexible substrates. The method of photolitography enables to create designed patterns in various material (e.g. metals as conductive layers) on various substrates (silicon wafers, foils, etc.). First the designed pattern is exposed through the mask by UV light into polymer resist, then the pattern is transfered into metal layer by wet etching through the developed windows in resist. In this paper several patterns are prepared through the positive resist PMMA by photolitography into various metal layer (Cu, Al) on flexible substrates.
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MEMS microhotplate platform for chemical sensors
Vančík, Silvester ; Svatoš, Vojtěch (oponent) ; Prášek, Jan (vedoucí práce)
This master’s thesis deals with design and fabrication of MEMS microhotplate platform for chemical gas sensors. The theoretical part describes MEMS, sensors and processes and technologies needed for fabrication of micro hotplate. The practical part includes simulations, masks and step by step microhotplate fabrication. Fabricated heating membrane was characterized and compared to theoretical values from simulations and to similar devices presented in literature.
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Photolithographic technique for controlled fabrication of metal structures
Jusková, Petra ; Hegrová, Jitka ; Foret, František
We are describing two strategies for controlled (geometry and dimension) preparation of metal micro-nano structures. Both techniques are based on photolithographic processes with selective pattern transfer. First technique utilizes agarose gel containing photosensitive silver chloride as the photosensitive layer. Silver structures are formed after irradiation of the gel through the photolithographic mask which defines shape of the resulting structures. Second approach utilizes photolithographic process to form particles from vacuum deposited thin metal layer deposited over soluble sacrificial layer.
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