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Preparation of sample cross-sections and analysis by SIMS
Karlovský, Juraj ; Pechal, Radim (referee) ; Bábor, Petr (advisor)
This thesis studies possible methods of semiconductor sample measurement by SIMS, with emphasis on testing different measurement parameters and sample preparation. Part of this master thesis deals with the design of a modified sample holder compatible with the used ToF-SIMS$^{5}$ instrument, IONTOF company, which is capable of tilting the sample by defined angle. This holder enables sample preparation in the main chamber of the instrument without the need of transferring the sample between instruments, which limits the probability of sample contamination. This sample holder was tested by ion machining of TIGBT sample edge and by imaging of a crater edge, created in previous measurement. Edge termination structures prepared by different techniques were measured on the TIGBT samples. Further measurements with the goal of optimizing the depth resolution for thin layers were done on Molybdenum-Silicon-multilayer X-Ray Mirror. Part of the measurements was focused on comparing depth profiles measured at low temperatures. For these measurements the samples with Indium multilayers in GaN substrate were used.
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Design of secondary electron detector for ultrahigh vacuum electron microscope
Skladaný, Roman ; Zigo, Juraj (referee) ; Bábor, Petr (advisor)
In this master’s thesis, a mechanical design of an in-column secondary electrons (SE) detector is presented. It is an ultravacuum compatible fibre-scintillation detector designed for use in an ultrahigh vacuum scanning electron microscope (UHV SEM). The designed in-column SE detector was manufactured and tested upon overcoming R&D challenges. The first section of this thesis deals with theoretical basis needed for understanding of functional principles of UHV SEM system and means of SE’s detection. In the second section, mechanical design of the in-column SE detector is described. The last section describes functionality of the designed detector. Effectiveness of light shielding of the detector was tested and the detective quantum efficiency was measured. Finally, images created by the designed in-column detector and an in-chamber SE detector were evaluated and compared.
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Analysis of locally modified surfaces for selective growth of cobalt
Krajňák, Tomáš ; Bábor, Petr (referee) ; Čechal, Jan (advisor)
In this thesis the chemical composition of silicon substrates locally modified by focused gallium ion beam by X-ray photoelectron spectroscopy is determined. In order to determine the influence of focused ion beam, the sample comprising sputtered square areas with nominal depths in range of 1 to 10 nm was prepared. Next, the sample was heated to elevated temperatures (500 - 700 °C) to reveal changes in the sputtered areas induced by annealing. In this work by X-ray photoelectron spectrometer Kratos Supra and electron microscope Tescan LYRA3 with focused ion beam were used. From the measured spectra of the Si 2p and Ga 2p3/2 peaks measured as a function of nominal sputtering depth and annealing temperature the following main observations were obtained. First, there is the additional peak component in the Si 2p peak, which can be assigned to the amorphous silicon. The second important finding is that gallium can be removed from near surface volume by annealing at temperatures beyond 700 °C.
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Design of the carbon atomic source for deposition of graphene in UHV
Čalkovský, Vojtěch ; Bábor, Petr (referee) ; Mach, Jindřich (advisor)
This bachelor's thesis deals with the design of the atomic carbon source for deposition of graphene layers in UHV conditions. In the first part are briefly described the problems of epitaxial growth, the theory of atomic beams and theory of sublimation. The second part is aimed on graphene description, namely on his properties and on the growth of graphene layers, especially by molecular beam epitaxy. The third part contains brief description of detection and analysis methods of carbon atomic beams. In the practical part of this bachelor's thesis the design and the numeric calculations were made in Simion 8.0 and EOD program. Afterwards the atomic carbon source was constructed. In the conclusion are discussed the obtained results.
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Analysis and modification of thin layers using ion beams
Jonner, Jakub ; Lörinčík, Jan (referee) ; Bábor, Petr (advisor)
This diploma thesis deals with analysis and modification of thin layers using ion beams. The first part of this diploma thesis deals with phenomena accompanying ion beam bombardment of solid matter. The second part of this diploma thesis is concerned with Secondary Ion Mass Spectroscopy (SIMS) and Low Energy Ion Scattering (LAIS). This work convey some basic information about these two techniques and it also deals with some benefits result in their connection into parallel depth profiling mode (such as better depth resolution of the LEIS profile, quantification of the SIMS). These benefits are demonstrated on MoSi film measurement. Within the framework of this thesis a new UHV manipulator was designed. This new UHV manipulator is equipped with precise stepper UHV motor and since the proportions are smaller, the manipulation with a sample in a space limited UHV chamber is much more comfortable and more precise. The third part of this diploma thesis deals with ion-beam induced transformation of epitaxially grown Fe films with thickness of 22 monolayer (ML) and 44 ML on Cu(100) single crystal at room temperature. Metastable Fe films of 22 ML thickness were prepared in CO pressure and 44 ML Fe films were prepared by co-evaporation of Fe with Fe64Ni36 (invar). Structural changes are analyzed by scanning tunneling microscopy and low-energy electron diffraction. The aim of this thesis is to discuss the influence of the sputtering parameters such as ion dose and ion energy on the nucleation of bcc nanocrystals, their growth, final shape and size. The influence of different Ni concentration on stability of 44 ML thick Fe films is also discussed.
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Study of catalytic decomposition of silica
Štubian, Martin ; Kolíbal, Miroslav (referee) ; Bábor, Petr (advisor)
This thesis deals with catalytic decomposition of silica using electron microscopy and Auger spectroscopy. The thesis is primarily focused on the Au-Si phase, which is created during in the reaction. In the theoretical part, the principle of used methods is described and recherche on the catalytic decomposition of silica is presented. The practical part contains the results of the measurements and their interpretation.
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Analysis of Trench Insulated Gate Bipolar Transistors
Karlovský, Juraj ; Polčák, Josef (referee) ; Bábor, Petr (advisor)
This thesis is focused on the selection and optimalization of suitable analytical methods for study of TIGBT (Trench Insulated Gate Bipolar Transistor) structures with a use of methods, that depict material composition of the studied sample. The theoretical part contain explana-tions of the analytical methods used for measurements and basic principle of operation of an TIGBT transistor. The practical part contain the methodic of measurements and the evaluation of the obtained data and design of optimal procedures in done experiments.
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Design of manipulator for ultrahigh electron microscope
Caesar, Radek ; Mach, Jindřich (referee) ; Bábor, Petr (advisor)
The main purpose of this thesis is mechanical design of a manipulator for an ultra-high vacuum scanning electron microscope (UHV SEM), being currently developed by TESCAN ORSAY HOLDING a.s. in cooperation with the Institute of physical engineering FME BUT. The manipulator is supposed to be able to handle with specimens in so-called preparation chamber, which the specimens are put in before placing into the analytic chamber. In the preparation chamber the surface finishing and also other operations are made. In the theoretical part some of the technologies used in vacuum engineering, especially various principles of pressure measurement and gas pumping, are described. Besides, the thesis is focused on a brief description of UHV SEM being developed and the methods of specimen preparation. The practical part deals with the concept and the mechanical design of manipulator itself.
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Study of CO oxidation on platinum by Auger spectroscopy
Hrůza, Dominik ; Voborný, Stanislav (referee) ; Bábor, Petr (advisor)
In the presented bachelor thesis, I deal with the study of the oxidation of carbon monoxide on platinum using Auger spectroscopy. In the introduction, I will describe the used methods. Furthermore, I theoretically describe the investigated reaction and indicate the measurements for a better understanding of the reaction. Then I will establish an experimental part, where I deal with the growth of graphene structures. This will be followed up by performing in-situ observations of the reaction with and without the presence of graphene. These measurements I compare and then analyse the surface composition during the reaction. Finally, I will create a methodology that can distinguish the individual molecules on the surface of the catalyst.
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