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Depth profiling of multilayers by LEIS
Strapko, Tomáš ; Duda, Radek (oponent) ; Bábor, Petr (vedoucí práce)
The master's thesis deals with introducing the model which would enable better interpretation of the depth profiles obtained by the LEIS method. The difficulty of the interpretation is caused by the significant contribution of multiple-scattered projectiles to the resulting measured spectra. These projectiles do not provide useful information from respected depth. In contrary, single-scattered projectiles yield more precise information about the composition and the thickness of the layers. The model created in the presented work attempts to determine the contribution of single-scattered particles to the resulting spectral shape and, based on the computation, a depth profile of the sample as well.
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Depth profiling of multilayers by LEIS
Strapko, Tomáš ; Duda, Radek (oponent) ; Bábor, Petr (vedoucí práce)
The master's thesis deals with introducing the model which would enable better interpretation of the depth profiles obtained by the LEIS method. The difficulty of the interpretation is caused by the significant contribution of multiple-scattered projectiles to the resulting measured spectra. These projectiles do not provide useful information from respected depth. In contrary, single-scattered projectiles yield more precise information about the composition and the thickness of the layers. The model created in the presented work attempts to determine the contribution of single-scattered particles to the resulting spectral shape and, based on the computation, a depth profile of the sample as well.
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