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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
SMV-2019-16: Deposition technology and implementation of EUV multilayer system
 Fořt, Tomáš
We have developed deposition technology and implementation of multilayer systems of Mg/Si or molybdenum and silicon prepared by magnetron sputtering. Interface roughness has to be smaller than 0.1 nm and reproducibility of bilayer thickness (i.e. molybdenum or Mg and silicon) must be better that 0.1 nm. This multilayer system was used as a EUV mirror.
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SMV-2013-29: Deposition technology and implementation of multilayer system
 Sobota, Jaroslav
We have developed deposition technology and implementation of multilayer system of molybdenum and silicon prepared by magnetron sputtering. Interface roughness has to be smaller than 0.2 nm and reproducibility of bilayer thickness (i.e. molybdenum and silicon) must be better that 0.1nm. This multilayer system was used as a mirror in x-ray laser PALS.
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