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Probe methods for diagnostics of plasmatic systems for deposition of thin films
Zanáška, Michal ; Tichý, Milan (advisor) ; Dvořák, Pavel (referee) ; Straňák, Vítězslav (referee)
The doctoral thesis deals with an experimental study of several diagnostic techniques intended for plasma diagnostics and diagnostics of thin films during reactive sputter deposition. A relatively novel probe diagnostic technique called Floating harmonic probe for measurement of the ion density and electron tem- perature in technological low-temperature plasma is studied. A Langmuir probe is commonly used, however, its application in conditions where non-conducting films are being deposited can be problematic or unreliable. The floating harmonic probe measurement technique deals with this inherent problem of the Langmuir probe. The Floating harmonic probe results are compared to those obtained by a classical Langmuir probe in non-reactive DC continuously driven discharge, and its applicability in reactive regime during deposition of iron oxide thin films is proved. The work deals also with a modification of the Floating harmonic probe called Phase Delay Harmonic Analysis Method which is intended for diagnostics of pulsed driven discharges. The second part of the thesis is devoted to a new proposed method for in-situ diagnostics of thin films. This method monitors the capacitance and resistance of a thin film during deposition up to the frequencies in the kHz range. This new method could be used for...
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Probe methods for diagnostics of plasmatic systems for deposition of thin films
Zanáška, Michal ; Tichý, Milan (advisor) ; Dvořák, Pavel (referee) ; Straňák, Vítězslav (referee)
The doctoral thesis deals with an experimental study of several diagnostic techniques intended for plasma diagnostics and diagnostics of thin films during reactive sputter deposition. A relatively novel probe diagnostic technique called Floating harmonic probe for measurement of the ion density and electron tem- perature in technological low-temperature plasma is studied. A Langmuir probe is commonly used, however, its application in conditions where non-conducting films are being deposited can be problematic or unreliable. The floating harmonic probe measurement technique deals with this inherent problem of the Langmuir probe. The Floating harmonic probe results are compared to those obtained by a classical Langmuir probe in non-reactive DC continuously driven discharge, and its applicability in reactive regime during deposition of iron oxide thin films is proved. The work deals also with a modification of the Floating harmonic probe called Phase Delay Harmonic Analysis Method which is intended for diagnostics of pulsed driven discharges. The second part of the thesis is devoted to a new proposed method for in-situ diagnostics of thin films. This method monitors the capacitance and resistance of a thin film during deposition up to the frequencies in the kHz range. This new method could be used for...
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Experimental study of the use of probe methods for diagnostic of low-temperature magnetized plasma
Zanáška, Michal ; Tichý, Milan (advisor) ; Adámek, Jiří (referee)
The ball-pen probe is a relatively new diagnostic method, that has been designed for direct measurement of plasma potential in magnetized plasmas. Nowadays, it is routinely used at several high-temperature plasma devices in Europe and it has been tested also in conditions of low-temperature plasma, which are substantially different from that of high-temperature plasma. The measurements performed so far showed, that ball-pen probe could be used also in low-temperature plasma. However, more measurements were needed to prove the applicability of ball-pen probe. Therefore, the main aim of this work is to compare the method of ball-pen probe with simultaneous measurements using Langmuir and emissive probe. Measurements were performed in DC discharge of cylindrical magnetron at various discharge conditions and radial positions of probes. Powered by TCPDF (www.tcpdf.org)
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Measurement of the plasma potential by means of the ball-pen and Langmuir probe
Zanáška, Michal ; Tichý, Milan (advisor) ; Hrachová, Věra (referee)
The ball-pen probe represents a new unique probe recently developed at the Institute of Plasma Physics in Prague for direct measurement of plasma potential at the CASTOR tokamak. Presently is the probe utilized also on several other high-temperature devices in Europe. In recent years one has aimed to use ball- pen probe also in conditions for which it was not originally intended. The aim of this bachelor thesis is to experimentally demonstrate that the ball-pen probe is suitable for the direct measurement of the plasma potential in low-temperature weakly magnetized plasma generated by a DC cylindrical magnetron by perfor- ming comparative measurements using a Langmuir probe. 1
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