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Comparison of the imaging capabilities of the transmission and scanning electron microscope
Maňka, Tadeáš ; Šamořil, Tomáš (referee) ; Zlámal, Jakub (advisor)
The aim of this work is to compare the imaging capabilities of the transmission and scanning electron microscope. The theoretical part describes the construction and the principle of each type of microscope. There is a list of the signal detectors, and the principle of imaging is described. The samples and their preparation are described. The practical part is aimed to imaging possibilities of both microscopes. A standard calibration samples were used for comparison. The advantages and disadvantages of both microscopes were discussed.
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Mechanical design of measurement system for reactive ion etching system
Maňka, Tadeáš ; Antoš, Martin (referee) ; Šerý, Mojmír (advisor)
The aim of this work is to design fully working measuring system for the reactive ion etching system (RIE). The Michelson interfometer, previously developed in Ústav přístrojové techniky, v.v.i., is used in this work. The theoretical part is aimed at description of interferometric methods for precise measuring of length. In next part the etching proces with RIE is described. In practical part the testing system was constructed from the parts of Thorlabs company . The functionality was controlled with this system and the results of measuring were compared with the profilometer. In next step technical drawings were created and the whole system was made.
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Surface acoustic wave microfluidic chip for rapid cell sorting
Vejrosta, Jakub ; Maňka, Tadeáš ; Plichta, Tomáš ; Šerý, Mojmír
This work revolves around microfluidics and micro-objects manipulation in general. In our device, we are producing surface acoustic wave (SAW). The SAW can be used to sort particles by their size or physical properties and separate them. In medical analysis SAW on microfluidic chip can be used to pre-sorting of body fluids or blood serum for further optical or chemical analysis. The wave is produced by pair of interdigital transducers (IDTs), which are situated on opposite sides of microfluidic channel. As our active material we have used lithium niobate crystalline material for its great piezoelectric properties. This work is also the precursor for measuring the rheological properties of a medium, such as micro-viscosity, via the measurement of the trajectory of a flow trace.
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Mechanical design of measurement system for reactive ion etching system
Maňka, Tadeáš ; Antoš, Martin (referee) ; Šerý, Mojmír (advisor)
The aim of this work is to design fully working measuring system for the reactive ion etching system (RIE). The Michelson interfometer, previously developed in Ústav přístrojové techniky, v.v.i., is used in this work. The theoretical part is aimed at description of interferometric methods for precise measuring of length. In next part the etching proces with RIE is described. In practical part the testing system was constructed from the parts of Thorlabs company . The functionality was controlled with this system and the results of measuring were compared with the profilometer. In next step technical drawings were created and the whole system was made.
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Comparison of the imaging capabilities of the transmission and scanning electron microscope
Maňka, Tadeáš ; Šamořil, Tomáš (referee) ; Zlámal, Jakub (advisor)
The aim of this work is to compare the imaging capabilities of the transmission and scanning electron microscope. The theoretical part describes the construction and the principle of each type of microscope. There is a list of the signal detectors, and the principle of imaging is described. The samples and their preparation are described. The practical part is aimed to imaging possibilities of both microscopes. A standard calibration samples were used for comparison. The advantages and disadvantages of both microscopes were discussed.
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