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National Repository of Grey Literature

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Jednotka pro odpařování precursoru pro PE CVD aparaturu MACKŮ, Jana The aim of the BS thesis is the design and construction of an electrically heated unit for controlled evaporation of precursor for PECVD apparatus. The work contains a description of the design of the evaporation unit and its implementation. The experimental measurements were performed with a PECVD apparatus. Thus, the designation of the characteristics of the evaporation unit was done to enable the utilisation of the project in laboratories. Furthermore, there is a comparison with the characteristics of a commercially available thermostatically heated evaporation unit enclosed. Detailed record

See also: similar author names
4	Macků, Jan
18	Macků, Jaromír
6	Macků, Jiří
1	Macků, Jozef

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