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Studium plazmatu během pulsní laserové depozice kompozitních vrstev nanokrystalického diamantu/amorfního uhlíku a jejich strukturní vlastnosti
Novotný, Michal ; Jelínek, Miroslav ; Bulíř, Jiří ; Vorlíček, Vladimír ; Mosnier, J.-P. ; Duclére, J.-R. ; Popov, C.
Nanocrystalline diamond/amorphous carbon composite thin films were prepared by hybrid technique combining pulsed laser deposition with a capacitively coupled radiofrequency discharge. Optical emission spectroscopy was performed for plasma monitoring during the deposition process.

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